Coating device and coating method

Abstract

The present invention provides an applying device and an applying method. In the condition of forming a coating formation unit formed through connecting a junction part with a junction nozzle and a solidification mechanism, the velocity of approach (coating processing speed) of the nozzle may be suitably ensured so as to perform suitable applying process, and at the same time, the regulation at the moment of the beginning of the solidification process is able to be suitably used and the regulation of the solidification process speed (solidification processing time) may be suitably carried out. The coating device (1) allows the nozzle and the solidification mechanism configured to solidify the coating liquid to move in the length direction of a substrate (2) through a coating formation unit (6) formed by connecting the junction part. After the applying process of the substrate through the nozzle is performed, the solidification process of the coating liquid applied on the substrate is performed through the solidification mechanism. The junction part has a regulation mechanism configured to regulate the interval of the nozzle and the solidification mechanism in the horizontal direction and a sliding mechanism (11) comprising a threaded shaft (11a) and a nut (11b).

Description

technical field [0001] The present invention relates to a coating device and a coating method capable of appropriately ensuring the travel speed of the nozzle ( Appropriate coating processing can be performed, and at the same time, the curing processing start time can be appropriately adjusted, and the curing processing speed (curing processing time) can also be appropriately adjusted. Background technique [0002] Conventionally, there is known a substrate coating device (for example, called a stage coater (registered trademark in Japan) etc.) that coats a substrate placed on a stage (stage) with a coating liquid sprayed from a nozzle. Among them, the nozzles are supported up and down freely on the support columns for nozzles that travel along the traveling rails for nozzles. Patent Documents 1 to 3 are known as such coating devices including a curing mechanism for curing a coating liquid applied to a substrate. [0003] The "pattern forming method and pattern forming app...

AI Technical Summary

Problems solved by technology

[0013] When the nozzle f and the curing mechanism g are connected by the connection part h and their distance LX is constant, the time interval from the spraying of the coating liquid to the start of the curing process is determined by the travel speed VX as described above. Therefore, when When the curing process is performed with priority to the travel speed VX of the coating process, there is a problem that the curing process starts too early or too late, so that the curing process cannot be started at the appropriate curing process start time, and furthermore, the curing process cannot be properly performed.

[0014] On the contrary, when the curing treatment is prioritized and the traveling speed VX is set to be suitable for the time interval at which the curing treatment can be properly performed, it is necessary to spray the coating liquid e from the nozzle f according to the traveling speed VX based on the curing treatment, and there is a problem. There is a problem that the control of the discharge amount, etc. becomes cumbersome, and that the coating process cannot be performed properly

[0015] Second, the moving speed of the nozzle f and the moving speed of the curing mechanism g are the same speed VX, and the coating processing speed and the curing processing speed cannot be changed and adjusted.

[0017] When the moving speed (advancing speed VX of the coating film forming unit) is set with priority to the coating process, since the curing mechanism g can only move at the same speed, the curing processing speed (curing processing time) cannot be properly ensured, and there is a problem Problems where the curing process energy becomes too much or not enough to properly perform the curing process

On the contrary, when the curing treatment is prioritized, there is a problem that the coating treatment cannot be properly performed as in the first case.

[0018] To sum up, in the coating film forming unit d in which the curing mechanism g and the nozzle f are connected and fixed through the connection part h with a constant interval LX, it is difficult to form a uniform film thickness, film quality, etc. and high quality. topics such as the coating film

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