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A pressure sensor and electronic device
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A pressure sensor, pressure technology, applied in the direction of measuring devices, instruments, measuring force, etc., can solve the problems of non-repeatable and large pressure response, affecting the sensitivity and accuracy of the pressure sensor.
Active Publication Date: 2019-05-17
SEMICON MFG INT (SHANGHAI) CORP
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Problems solved by technology
[0004] Among them, while the pressure sensor is widely used, there are also some problems. In the process of sensing pressure, when the pressure is small, the response between the force on the covering layer and the detection pressure has a good linear relationship. , but as the pressure increases, the pressure response becomes unrepeatable, the force on the covering layer does not increase constantly as the pressure increases, and the pressure response does not have a good linear relationship, such as Figure 1c As shown, thus affecting the sensitivity and accuracy of the pressure sensor
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Embodiment 1
[0043] In order to solve the problems existing in the prior art, the present invention provides a pressure sensor, the following in conjunction with the attached Figure 2a-2c Further description will be made on the pressure sensor.
[0044] The pressure sensor of the present invention includes a pressure sensing unit and a pressure reference unit, wherein, in order to solve various problems existing in the prior art, the structures of the pressure sensing unit and the pressure reference unit are improved, respectively, as follows The improvements are described.
[0045] First, refer to Figure 2a-2b , where the Figure 2a is a cross-sectional view of the pressure sensing unit, Figure 2b It is the top view of the pressure sensing unit.
[0046] Such as Figure 2a As shown, the pressure sensing unit includes:
[0047] A substrate 201, wherein a pressure sensor bottom electrode 204 is formed in the substrate 201;
[0048] a pressure sensing film 203 located above the botto...
Embodiment 2
[0069] The present invention also provides an electronic device, including the pressure sensor described in Embodiment 1.
[0070] The electronic device of this embodiment can be any electronic product or equipment such as mobile phone, tablet computer, notebook computer, netbook, game console, TV set, VCD, DVD, navigator, camera, video recorder, voice recorder, MP3, MP4, PSP, etc. , can also be any intermediate product including the pressure sensor. The electronic device according to the embodiment of the present invention has better performance due to the use of the above-mentioned pressure sensor.
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Abstract
The invention relates to a pressure sensor and an electronic device. The pressure sensor comprises a pressure sensing unit, wherein the pressure sensing unit comprises a plurality of linear openings which are spaced at intervals to expose a pressure sensing film; and the plurality of linear openings are arranged in an annular structure to form a pressing sensing region. In order to solve the problem existing in the prior art, the new pressure sensor is provided by the invention, the pressure sensor comprises the pressure sensing unit and a pressure reference unit, the pressing sensing region in the pressure sensing unit is improved from a conventional rectangular structure to the annular structure formed by the plurality of linear openings which are spaced at intervals, the linear openings have smaller critical size, no pressure sensor cavity is formed in the pressure reference unit, the position of a pressure sensor cavity is filled with a filling material layer, and the sensitivity, accuracy and stability of the pressure sensor can be further enhanced through the improvements.
Description
technical field [0001] The invention relates to the field of semiconductors, in particular, the invention relates to a pressure sensor and an electronic device. Background technique [0002] With the continuous development of semiconductor technology, in the market of sensor (motion sensor) products, smart phones, integrated CMOS and microelectromechanical system (MEMS) devices have increasingly become the most mainstream and advanced technology, and with the update of technology , the development direction of this type of sensor products is smaller size, high-quality electrical performance and lower loss. [0003] Micro-electro-mechanical systems (MEMS) have obvious advantages in terms of volume, power consumption, weight, and price. So far, a variety of different sensors have been developed, such as pressure sensors, acceleration sensors, inertial sensors, and other sensors. [0004] Among them, while the pressure sensor is widely used, there are also some problems. In th...
Claims
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Application Information
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