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Gyroscope structure and gyroscope with improved quadrature compensation

一种结构件、梳状结构的技术，应用在陀螺仪/转向感应设备、陀螺效应进行速度测量、仪器等方向

Active Publication Date: 2016-05-04
MURATA MFG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

It is readily understood that it can be challenging, or even impossible, to manufacture related art surrounding stationary electrode configurations to provide the necessary compensating voltage differences in a temperature robust manner.

Method used

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  • Gyroscope structure and gyroscope with improved quadrature compensation
  • Gyroscope structure and gyroscope with improved quadrature compensation
  • Gyroscope structure and gyroscope with improved quadrature compensation

Examples

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Embodiment Construction

[0023] The following examples are exemplary. Although the specification may refer to "an" ("an" or "one") or "some" embodiments, this does not necessarily mean that each such reference is to the same embodiment(s), or features Applies to a single embodiment only. Single features of different embodiments may be combined to provide further embodiments.

[0024] Hereinafter, features of the present invention will be described taking a device architecture as a simple example in which various embodiments of the present invention can be implemented. Only elements relevant to the illustrated embodiment are described in detail. Various implementations of gyroscope structures generally known to those skilled in the art may not be described in detail herein.

[0025] The invention is applicable to any gyroscope structure comprising at least one seismic mass configured to undergo out-of-plane principal motion. Figure 2A and Figure 2B The basic concepts and directions applied in th...

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Abstract

The invention provides a gyroscope structure and gyroscope with improved quadrature compensation. A microelectromechanical gyroscope structure that comprises a seismic mass, a body element, and a spring structure suspending the seismic mass to the body element. In primary oscillation at least part of the seismic mass oscillates in out-of-plane direction. A first conductor is arranged to move with the seismic mass, and a second conductor is attached to the body element. The conductors include adjacent surfaces that extend in the first direction and the third direction. A voltage element is arranged to create between the first surface and the second surface a potential difference and thereby induce an electrostatic force in the second direction and modulated by the primary oscillation of the seismic mass.

Description

technical field [0001] The invention relates to microelectromechanical devices, in particular to gyroscope structures and gyroscopes as defined by the preambles of the independent claims. Background technique [0002] Micro-Electro-Mechanical Systems (Micro-Electro-Mechanical Systems) or MEMS can be defined as miniaturized mechanical and electromechanical systems in which at least some elements have mechanical functions. Since MEMS devices are created using the same tools used to create integrated circuits, micromechanical and microelectronic components can be fabricated on the same silicon wafers to enable intelligent machines. [0003] MEMS structures can be applied to rapidly and precisely detect very small changes in physical properties. For example, MEMS gyroscopes can be applied to detect very small angular displacements quickly and accurately. Motion has six degrees of freedom: translation in three orthogonal directions and rotation about three orthogonal axes. The...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/5712G01C19/5755G01C19/5776
Inventor 马库斯·林基奥安斯·布卢姆奎斯特亚科·罗希奥
Owner MURATA MFG CO LTD
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