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Operation/margin enhancement feature for surface-MEMS structure, and sculpting raised address electrode

A non-planar and planar technology, applied in the process of producing decorative surface effects, microstructure technology, microstructure devices, etc., can solve problems such as structure reduction

Active Publication Date: 2016-05-11
TEXAS INSTR INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The situation described above raises the question of the ability to shrink structures while attempting to maintain electrostatic confinement

Method used

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  • Operation/margin enhancement feature for surface-MEMS structure, and sculpting raised address electrode
  • Operation/margin enhancement feature for surface-MEMS structure, and sculpting raised address electrode
  • Operation/margin enhancement feature for surface-MEMS structure, and sculpting raised address electrode

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Embodiment Construction

[0027] discussed below Figures 1 to 23 And the various embodiments used to describe the principles of the invention in this patent document are done by way of illustration only and should in no way be construed as limiting the scope of the invention in any way. Those skilled in the art will understand that the principles of the invention may be implemented in any suitable way and in any type of suitably arranged device or system.

[0028] figure 1 is an exploded view of pixel element 10 (shown as a DMD pixel in this example embodiment). Pixel element 10 is one of an array of such pixel elements fabricated on a wafer (substrate) using semiconductor fabrication techniques. The pixel element 10 is a monolithically integrated MEMS superstructure unit fabricated above a SRAM memory unit 11 formed on a wafer. Two sacrificial photoresist layers have been removed by plasma etching to create air gaps between the three metal layers of the superstructure. For the purposes of this il...

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PUM

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Abstract

The invention relates to an operation / margin enhancement feature for a surface-MEMS structure, and a sculpting raised address electrode. A method of forming a micro-electromechanical systems (MEMS) pixel, such as a DMD type pixel, by forming a substrate having a non-planar upper surface, and depositing a photoresist spacer layer upon the substrate. The spacer layer is exposed to a grey-scale lithographic mask to shape an upper surface of the spacer layer. A control member is formed upon the planarized spacer layer, and an image member is formed over the control member. The image member is configured to be positioned as a function of the control member to form a spatial light modulator (SLM). The spacer layer is planarized by masking a selected portion of the spacer layer with a grey-scale lithographic mask to remove binge in the selected portion.

Description

technical field [0001] The present invention relates generally to semiconductor microelectromechanical systems (MEMS) technology, and more particularly to spatial light modulators (SLMs). Background technique [0002] Semiconductor spatial light modulators (SLMs) are suitable for digital imaging applications, including projectors, televisions, printers, and other technologies. A digital micromirror device (DMD) is a type of SLM invented in 1987 at Texas Instruments, Dallas, Texas, USA. DMDs are monolithic semiconductor devices based on Micro Electro Mechanical Systems (MEMS) technology. A DMD typically includes an array of bistable movable micromirrors formed above an array of correspondingly addressed memory cells to form an array of picture elements (pixels) and associated addressing electrodes disposed below the micromirrors. The address electrodes are selectively energized by a control circuit with a voltage potential to create an electrostatic attraction that causes t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81C1/00
CPCB81C1/00198B81B3/0045B81B2201/042B81B2203/0154B81B2203/058G02B26/0841B81B3/00
Inventor 帕特里克·I·奥登詹姆斯·C·贝克桑德拉·郑威廉姆·C·麦克唐纳兰斯·W·巴伦
Owner TEXAS INSTR INC