Online seal detection device, multi-section type seal cavity machining equipment and method
A technology of sealing detection and processing equipment, which is applied in the direction of measuring device, fluid tightness test, and liquid tightness measurement using liquid/vacuum degree, etc. Efficiency and other issues to achieve the effect of improving the efficiency of seal detection
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[0036] Preferred embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0037] In order to achieve the purpose of the present invention, as Figure 1-3 As shown, in some embodiments of the online sealing detection device of the present invention, it is arranged on the butt surface 12 of two cavities 11, the cavity 11 is located in the vacuum device 1, and the online sealing detection device specifically includes: a sealing ring 2. It is installed in the butt surface 12 of the two cavities 11 (specifically, it can be used in the flange for connection), and the sealing ring 2 is provided with a circumferential chamber 21, and the chamber 21 can be used as required Set one or more; air inlet and outlet unit 2, which communicates with the inside of the chamber 21, the air inlet and outlet unit 2 can be a pipeline or a cavity, etc., the air inlet and outlet unit 2 is provided with a detection unit 4, the detection uni...
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