Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Novel spraying device for multiple substrates

A spraying device and a substrate technology, applied in the micro-nano field, can solve the problems of low efficiency of a single substrate, cannot meet the simultaneous spraying of multiple substrates, etc., and achieve the effects of efficient and fast spraying, suitable for popularization and use, and convenient replacement.

Active Publication Date: 2016-08-31
SUZHOU MEMSTOOLS SEMICON TECH CO LTD
View PDF13 Cites 2 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The single-chip substrate is inefficient in the spraying production process, which cannot meet the needs of simultaneous spraying of multiple substrates

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Novel spraying device for multiple substrates
  • Novel spraying device for multiple substrates
  • Novel spraying device for multiple substrates

Examples

Experimental program
Comparison scheme
Effect test

specific Embodiment

[0016] For specific examples, see Figure 1-7 , a new type of multi-chip substrate spraying device, including a working panel 1, a pad base 2, an insulating base plate 3, a silicone heater 4, a heating plate 5 and a slide holder 6, and the bottom of the insulating base plate 3 passes through the pad base 2 is fixed on the working panel 1, the heat insulating bottom plate 3 is provided with a silica gel heater 4, and the silica gel heater 4 is provided with a heating plate 5, and the heating plate 5 is provided with a plurality of horizontal vacuum suction grooves 15 and A vertical vacuum suction groove 16, the horizontal vacuum suction groove 15 is connected together by the vertical vacuum suction groove 16, one side of the heating plate 5 is provided with a vacuum air pipe joint 12, and the vacuum air pipe joint 12 is connected with a horizontal vacuum suction suction groove 16. One end of the groove 15 communicates through the main connection suction hole 17, and the heating...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention relates to the micro-nano technical field, in particular to a novel spraying device for multiple substrates. The novel spraying device for the multiple substrates comprises a working panel, a cushion block base, a heat insulating bottom plate, a silica gel heater, a heating plate and a slide glass clamp. According to the novel spraying device for multiple substrates, substrates can be simultaneously placed on a plurality of substrate placing square sheets, the spraying of multiple substrates is simultaneously completed, and the slide glass clamp is convenient to replace. Besides, the novel spraying device for multiple substrates is reasonable in structural design, is efficient and quick in substrate spraying and is suitable for being popularized and used.

Description

technical field [0001] The invention relates to the field of micro-nano technology, in particular to a novel multi-chip substrate spraying device. Background technique [0002] In the field of micro and nanotechnology, the use of substrates is very common. The efficiency of a single substrate in the spraying production process is low, and it cannot meet the needs of simultaneous spraying of multiple substrates. [0003] In order to solve the above-mentioned technical problems, the present invention designs a novel multi-substrate spraying device, which can simultaneously place substrates on multiple substrate placement squares, and simultaneously completes the multi-substrate coating process. Spraying, and the slide holder is easy to replace. In addition, the new multi-chip substrate spraying device has a reasonable structural design, efficient and quick spraying of the substrate, and is suitable for popularization and use. Contents of the invention [0004] In order to...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): B05B13/02
CPCB05B13/02
Inventor 王云翔
Owner SUZHOU MEMSTOOLS SEMICON TECH CO LTD
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com