Novel spraying device for multiple substrates

A spraying device and a substrate technology, applied in the micro-nano field, can solve the problems of low efficiency of a single substrate, cannot meet the simultaneous spraying of multiple substrates, etc., and achieve the effects of efficient and fast spraying, suitable for popularization and use, and convenient replacement.

Active Publication Date: 2016-08-31
SUZHOU MEMSTOOLS SEMICON TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The single-chip substrate is inefficient in the spraying production process,

Method used

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  • Novel spraying device for multiple substrates
  • Novel spraying device for multiple substrates
  • Novel spraying device for multiple substrates

Examples

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specific Embodiment

[0016] For specific examples, see Figure 1-7 , a new type of multi-chip substrate spraying device, including a working panel 1, a pad base 2, an insulating base plate 3, a silicone heater 4, a heating plate 5 and a slide holder 6, and the bottom of the insulating base plate 3 passes through the pad base 2 is fixed on the working panel 1, the heat insulating bottom plate 3 is provided with a silica gel heater 4, and the silica gel heater 4 is provided with a heating plate 5, and the heating plate 5 is provided with a plurality of horizontal vacuum suction grooves 15 and A vertical vacuum suction groove 16, the horizontal vacuum suction groove 15 is connected together by the vertical vacuum suction groove 16, one side of the heating plate 5 is provided with a vacuum air pipe joint 12, and the vacuum air pipe joint 12 is connected with a horizontal vacuum suction suction groove 16. One end of the groove 15 communicates through the main connection suction hole 17, and the heating...

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Abstract

The invention relates to the micro-nano technical field, in particular to a novel spraying device for multiple substrates. The novel spraying device for the multiple substrates comprises a working panel, a cushion block base, a heat insulating bottom plate, a silica gel heater, a heating plate and a slide glass clamp. According to the novel spraying device for multiple substrates, substrates can be simultaneously placed on a plurality of substrate placing square sheets, the spraying of multiple substrates is simultaneously completed, and the slide glass clamp is convenient to replace. Besides, the novel spraying device for multiple substrates is reasonable in structural design, is efficient and quick in substrate spraying and is suitable for being popularized and used.

Description

technical field [0001] The invention relates to the field of micro-nano technology, in particular to a novel multi-chip substrate spraying device. Background technique [0002] In the field of micro and nanotechnology, the use of substrates is very common. The efficiency of a single substrate in the spraying production process is low, and it cannot meet the needs of simultaneous spraying of multiple substrates. [0003] In order to solve the above-mentioned technical problems, the present invention designs a novel multi-substrate spraying device, which can simultaneously place substrates on multiple substrate placement squares, and simultaneously completes the multi-substrate coating process. Spraying, and the slide holder is easy to replace. In addition, the new multi-chip substrate spraying device has a reasonable structural design, efficient and quick spraying of the substrate, and is suitable for popularization and use. Contents of the invention [0004] In order to...

Claims

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Application Information

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IPC IPC(8): B05B13/02
CPCB05B13/02
Inventor 王云翔
Owner SUZHOU MEMSTOOLS SEMICON TECH CO LTD
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