2 results about "Micro nanotechnology" patented technology

This invention belongs to the field of micro-nano technology and electron beam lithography application technology, specifically relating to a diffraction-based waveguide electronic beam exposure method and system that balances high speed with sub-nanometer writing field stitching errors. The method includes: designing a test pattern based on an AR waveguide structure and actual task exposure time; conducting exposure experiments based on the test pattern, testing and recording the stitching error values ​​at the writing field boundaries and four corner positions, and establishing a stitching error database under different writing field correction values; obtaining a coefficient matrix and initial error through polynomial fitting based on the stitching error database under different writing field correction values; and obtaining correction variables for preset design values ​​based on the coefficient matrix and the initial error, and correcting the exposure accordingly. This invention provides an easily implemented electron beam writing field pre-calibration method that can truly meet the dual requirements of high-precision and high-efficiency exposure in industrial production.

The invention discloses a complete virus particle detection quantification system and method based on droplet microfluidics, and belongs to the field of micro-nano technology, the system comprises a single virus adsorption microsphere and two subsystems; the single virus adsorption microspheres are coupled with an antibody through a streptavidin chemical bond, and single viruses are adsorbed by virtue of antigen-antibody specific binding; the single virus nucleic acid detection subsystem wraps microsphere liquid drops with viruses, water-phase liquid containing microsphere-virus samples and a fluorescent probe reagent are subjected to RT-PCR amplification, single virus nucleic acid is detected in the liquid drops, and fluorescent probes are used for calibrating and comparing fluorescence intensity. And the high-throughput liquid drop screening subsystem analyzes the size of the liquid drop and the intensity of the fluorescence signal, identifies the liquid drop containing the single virus, and accurately counts the fluorescence liquid drops, so that quantitative analysis on the single virus level is realized. Complete virus particles are identified by adopting a method of combining nucleic acid detection and protein detection, and high-sensitivity detection and absolute quantitative analysis on a single virus level are realized by adopting a droplet microfluidic technology.