6 results about "Micro nanotechnology" patented technology

This invention belongs to the field of micro-nano technology and electron beam lithography application technology, specifically relating to a diffraction-based waveguide electronic beam exposure method and system that balances high speed with sub-nanometer writing field stitching errors. The method includes: designing a test pattern based on an AR waveguide structure and actual task exposure time; conducting exposure experiments based on the test pattern, testing and recording the stitching error values ​​at the writing field boundaries and four corner positions, and establishing a stitching error database under different writing field correction values; obtaining a coefficient matrix and initial error through polynomial fitting based on the stitching error database under different writing field correction values; and obtaining correction variables for preset design values ​​based on the coefficient matrix and the initial error, and correcting the exposure accordingly. This invention provides an easily implemented electron beam writing field pre-calibration method that can truly meet the dual requirements of high-precision and high-efficiency exposure in industrial production.

This invention discloses a method and system for determining the temperature / strain rate dependence of metal strength, belonging to the field of micro-nano technology. The method obtains the compression or tension stress-strain curves of micro-nano metal samples, as well as the background noise of the no-load test. Based on the background noise, the maximum displacement rate of the micro-nano mechanical testing instrument is determined and used as a threshold. Based on the threshold, the stress-strain curves are iterated to determine the start and end points of all dislocation avalanches, the total plastic displacement of the dislocation avalanches, and the intensity ratio of the micro-nano metal sample, thereby determining the temperature / strain rate dependence of the metal strength. This method, through testing a single sample at room temperature and calculating the intensity ratio, can quantitatively and accurately confirm whether the strength is temperature-dependent, thus avoiding the limitations of qualitative analysis and the need for multiple multi-sample experiments to save time, manpower, and other experimental costs.

The invention discloses a complete virus particle detection quantification system and method based on droplet microfluidics, and belongs to the field of micro-nano technology, the system comprises a single virus adsorption microsphere and two subsystems; the single virus adsorption microspheres are coupled with an antibody through a streptavidin chemical bond, and single viruses are adsorbed by virtue of antigen-antibody specific binding; the single virus nucleic acid detection subsystem wraps microsphere liquid drops with viruses, water-phase liquid containing microsphere-virus samples and a fluorescent probe reagent are subjected to RT-PCR amplification, single virus nucleic acid is detected in the liquid drops, and fluorescent probes are used for calibrating and comparing fluorescence intensity. And the high-throughput liquid drop screening subsystem analyzes the size of the liquid drop and the intensity of the fluorescence signal, identifies the liquid drop containing the single virus, and accurately counts the fluorescence liquid drops, so that quantitative analysis on the single virus level is realized. Complete virus particles are identified by adopting a method of combining nucleic acid detection and protein detection, and high-sensitivity detection and absolute quantitative analysis on a single virus level are realized by adopting a droplet microfluidic technology.

The utility model discloses a micro-nanotechnology aeration device in water treatment, which comprises a gas guide structure and a telescopic nylon woven hose structure, the lower end of the gas guide structure is communicated with the telescopic nylon woven hose structure, the lower end of the telescopic nylon woven hose structure is connected with a flange plate, and the flange plate is connected with a water inlet. The side end of the flange plate is communicated with a matching guide seat through an air guide pipe, the matching guide seat is communicated with a corundum aeration head, the lower end of the matching guide seat rotates through a supporting seat, and the center of the supporting seat can be rotationally adjusted with the telescopic nylon woven hose structure through the flange plate; the side end of the metal telescopic frame is hinged to the mounting plate in a limiting mode, and an electric control telescopic air cylinder is further mounted on the mounting plate. The utility model relates to a micro-nano technology aeration device in water treatment, which realizes the purpose of automatically adjusting aeration in the longitudinal and transverse directions through the arrangement of the structure.

The invention discloses a micro-nano structure material and a manufacturing method and process, and relates to the field of micro-nano technology, the base material structure comprises a base material body (0), a deformation response surface (1) arranged on the front side of the base material body (0) and a stress modulation surface (2) arranged on the back side of the base material body (0), and the deformation response surface (1) and the stress modulation surface (2) are respectively positioned on two opposite sides of the base material body (0). The stress modulation surface (2) comprises at least one of a patterned residual stress area, a lattice distortion area, a phase change area, a component gradient area or an interface stress area, an energy field modulated through space is formed on the back face of the base material body (0), internal stress propagation induced by the energy field enables the front face to generate a surface structure, and the deformation response surface (1) is formed. According to the invention, a micro-nano processing normal form in recent hundreds of years is changed, and the method has obvious pioneering property and belongs to a meta-development-level technical invention.

According to the extrusion stretching electric field regulation and control rapid cooling method, a macroscopic machining technology, temperature control, electric field regulation and control and a microcosmic nanotechnology are combined, and a quasi-one-dimensional chain array which is consistent in water molecule orientation and perpendicular to an interface is prepared through the steps of extrusion, temperature rising, stretching, electric field regulation and control and rapid cooling. According to the method, a novel water molecule ordering approach is provided, a physical method is adopted in the whole process, no chemical reaction is involved, the method is green and environmentally friendly, and an existing mature technology is adopted. The angstrom chain array is packaged and protected by a substrate material and is in a low-temperature locking state, the structure can be maintained, the substrate simultaneously has preparation and protection functions, and the prepared material can be more conveniently separated, stored, observed and applied.