Apparatus for testing one-way flexural-tensile fatigue of microstructure

A fatigue test and microstructure technology, applied in microstructure devices, microstructure technology, and the use of repetitive force/pulse force to test the strength of materials, etc., to achieve the effect of improving stress level, easy processing, and high practical value

Inactive Publication Date: 2006-06-21
BEIJING UNIV OF TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] 1) The feature size of the new device

Method used

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  • Apparatus for testing one-way flexural-tensile fatigue of microstructure
  • Apparatus for testing one-way flexural-tensile fatigue of microstructure
  • Apparatus for testing one-way flexural-tensile fatigue of microstructure

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Experimental program
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Embodiment Construction

[0036] The specific embodiments of the utility model are described below in conjunction with the drawings:

[0037] The schematic diagram of the structure of the microstructure bending and tensile fatigue test device designed according to the basic idea of ​​the technical solution is shown in figure 1 , figure 2 Shown

[0038] figure 1 Is the positive overall picture, figure 2 It is a partial enlarged view of the main structure of the front.

[0039] See figure 1 As shown, 1, 2, and 3 are three electrodes; the surface of each electrode is a layer of metal called metal layer 4, the purpose is to enhance the conductivity, the metal layer is a polysilicon structure layer 5, the main structure of the device In this layer, below the polysilicon structure layer is the anchor layer 6. Please refer to the cross-sectional view of each structure layer of the electrode image 3 ; The entire electrode is anchored on the silicon wafer substrate through the anchor layer.

[0040] figure ...

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Abstract

The invention discloses a microstructure unidirectional bending fatigue test device, which is characterized by the following: the driving comb couple is set on one side of hung vibration block and the test comb couple is set to detect the vibration amplitude on the other side; the outside wall of driving and test comb couples is fixed on the silicon base through anchor fixing layer, which connects the driving electrode to generate periodic electrostatic force and test electrode of sensing circuit; the end of hung vibration block connects one end of sample to produce alternating stress; the other end connects the ground electrode; the sample integrates with the driving and detecting device; the driving electrode connects the output probe of power amplifier; the test electrode is leaded by probe to connect the input end of terminal control equipment after the probe is switched in the amplitude measuring circuit. The device adapts the research based on micronanometer technique on the MEMS system.

Description

Technical field [0001] The invention relates to a fatigue test device, in particular to a micro-structure unidirectional bending and tensioning applied to the study of the fatigue characteristics of MEMS (Micro-Electro-Mechanical System) structural material polycrystalline silicon in the basic research field of micro-nano technology Fatigue test device. Background technique [0002] Studies have found that silicon, which is a brittle material in a macroscopic state, will have fatigue properties at the micro-nano scale. At present, the mechanism of this change is not clear. Therefore, understanding this mechanism and measuring the fatigue characteristics of silicon at the micrometer scale are of great significance for the reliability design and life prediction of MEMS. The fatigue test under the traditional macro-scale is generally carried out on a dedicated material fatigue testing machine, and the standard specimens are clamped by a fixture, using hydraulic, electromagnetic and ...

Claims

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Application Information

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IPC IPC(8): G01N3/38
CPCB81C99/005
Inventor 丁雷尚德广贾冠华孙国芹李浩群
Owner BEIJING UNIV OF TECH
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