Substrate holding apparatus

A fixed device and fixed position technology, applied in the direction of discharge tubes, electrical components, circuits, etc., can solve the problems of position deviation of the substrate and large-scale complex devices

Active Publication Date: 2016-11-16
NISSIN ION EQUIP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, in the substrate fixing device having the above configuration, since the substrate is fixed only by the two opposing sides, there is a possibility that the substrate may be shifted in a direction perpendicular to the opposing direction.
[0005] The above-mentioned problems are particularly noticeable when the ion beam implanter lifts up a horizontally plac

Method used

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Example Embodiment

[0073] An embodiment of the substrate fixing device of the present invention will be described below with reference to the drawings.

[0074] The substrate fixing device 100 of this embodiment is, for example, an ion beam irradiation device and fixing a substrate W belonging to a processing target, and such as figure 1 and figure 2 As shown, it is provided with a platform 10 on which a substantially rectangular thin-plate-shaped substrate W is placed and a gripping mechanism 20; the gripping mechanism 20 fixes the substrate W between the gripping mechanism 20 and the platform 10.

[0075] The aforementioned platform 10 transfers the substrate W to a transport robot (not shown), and is configured to be rotatable about the axis I between the horizontal posture where the substrate W is placed and the erect posture standing up from the horizontal posture.

[0076] In addition, the horizontal posture here includes a posture inclined from the horizontal direction, and the standing posture ...

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Abstract

Provided is a substrate holding device that reliably fixes a substrate without complicating the structure of the device and increasing the size of the whole device. The substrate holding device according to the present invention includes a platform and a grasping mechanism, wherein the grasping mechanism includes a plurality of clamps which are provided in correspondence with respective sides of the substrate and move between a fixed position in which the substrate is fixed and a releasing position for releasing the substrate, and a power transmission mechanism for transmitting a driving force for moving the clamp between the clamp provided on one side corresponding to one of opposite sides of the substrate and the clamp provided at the other side corresponding to the other side, and the power transmission mechanism includes a slide member that slides and moves in the predetermined direction along with the movement of the clamp at one side or the movement of a member for transmitting a driving force to the clamp at the other side to transmit the driving force to the clamp at the other side.

Description

technical field [0001] The invention relates to a substrate fixing device for fixing a substrate. Background technique [0002] As for the above-mentioned type of substrate fixing device, there is a substrate fixing device as disclosed in Patent Document 1, which is an ion beam irradiation device for irradiating a substrate with an ion beam, and includes a stage and a chuck on which a substantially rectangular substrate is placed. A gripping mechanism; the gripping mechanism fixes the substrate between the gripping mechanism and the platform. [0003] Specifically, the clamping mechanism is provided with a pair of clamps and an actuator respectively provided corresponding to two sides of the substrate facing each other; the actuator is provided corresponding to each clamp so that each clamp is fixed at the fixed position of the substrate Move between the release position and the release substrate. [0004] However, in the substrate fixing device configured as described abo...

Claims

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Application Information

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IPC IPC(8): H01J37/317
Inventor 中泽喜之小野田正敏
Owner NISSIN ION EQUIP CO LTD
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