Differential pressure sensor
一种传感器、压差的技术,应用在仪器、多个阀之间的压力差测量、测量流体压力等方向,能够解决迟滞误差等问题
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[0049] figure 1 The differential pressure sensor 1 shown in includes a differential pressure measuring cell 2 having a measuring membrane 10, a first platform 20 and a second platform 30, wherein the measuring membrane 10 is arranged between the first platform and the second platform, and along the periphery The junction pressure-tightly connects the two platforms such that a first pressure chamber 22 is formed between the first platform and the measuring membrane and a second pressure chamber is formed between the second platform and the measuring membrane. The pressure chamber can be contacted via the pressure supply line 24, 34 respectively to the first or the second pressure, wherein the measuring membrane is deflectable according to the difference between the two pressures, and wherein the differential pressure measuring unit has, in particular, a capacitive or piezoresistive transducer. The sensor converts the deflection of the measuring membrane into an electrical signa...
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