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Grazing incidence interferometer with bilateral measurement capability

A grazing incidence and interferometer technology, applied in the direction of interferometers, measuring devices, instruments, etc., can solve problems that occur and need to be suppressed

Active Publication Date: 2021-11-05
CORNING INC
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This makes measuring the opposite surface of a generally planar object problematic
In addition, zero-diffracted-order beams are not used and thus need to be suppressed

Method used

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  • Grazing incidence interferometer with bilateral measurement capability
  • Grazing incidence interferometer with bilateral measurement capability
  • Grazing incidence interferometer with bilateral measurement capability

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Embodiment Construction

[0022] Reference will now be made in detail to the various embodiments of the present disclosure, examples of which are illustrated in the accompanying drawings. Wherever possible, the same or like reference numerals will be used throughout the drawings to refer to the same or like parts. The figures are not necessarily drawn to scale, and one skilled in the art recognizes where the figures have been simplified to illustrate key aspects of the disclosure.

[0023] The claims set forth below are incorporated into and constitute a part of this Detailed Description.

[0024] Cartesian coordinates are shown in some of the figures for reference purposes, but Cartesian coordinates are not intended to be limiting as to direction or orientation.

[0025] In the following description, the term "first order" or "first diffraction order" refers to -1 or +1 diffraction order, while the term "respective first order" or "respective first diffraction order" refers to -1 Both with +1 diffra...

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Abstract

A grazing incidence interferometer includes first and second spaced diffractive optical elements with a substantially planar object disposed therebetween. The first diffractive optical element forms a clipped first diffractive order beam that is reflected from the opposite first and second surfaces of the object at a grazing incidence angle, while the zero diffractive order beam is not reflected. The second diffractive optical element combines the unreflected zero-diffractive order beam and the clipped reflected beam to form a collimated combined beam. The 1X bi-telecentric relay system relays the combined beams to the folding optics which form the first and second interference images on a diffuse screen located at the image plane. Digital images of the first interferometric image and the second interferometric image are acquired and processed to characterize thickness variations of the object.

Description

[0001] This application claims priority under 35 U.S.C. §119 to U.S. Provisional Application S / N 61 / 867223, filed August 19, 2013, upon which this application is based and which is hereby incorporated by reference in its entirety . technical field [0002] The present disclosure relates to grazing incidence interferometers and more particularly to grazing incidence interferometers with bilateral measurement capability. [0003] The entire disclosure of any publication or patent document mentioned herein is hereby incorporated by reference. Background technique [0004] Interferometry is the measurement of the interference fringe pattern between an object beam and a reference beam. The comparison of these two beams allows a very accurate measurement of an object beam that has been deformed by some surface or object. [0005] Grazing incidence interferometers use an object beam that reflects off the object at a high angle of incidence. Such interferometers can be very usefu...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B9/02G01B11/06
CPCG01B9/02021G01B9/02022G01B9/02027G01B11/06G01B2290/30G01B9/02072G01B9/02041
Inventor J·M·科布T·J·邓恩J·W·弗兰克维奇
Owner CORNING INC
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