A linear motor, a motion table and a photolithography device
A linear motor, the same technology, applied in the direction of electromechanical devices, electric components, electrical components, etc., to achieve the effect of linear and rotational degrees of freedom functions
Active Publication Date: 2019-04-12
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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Problems solved by technology
[0007] However, the traditional double-sided magnetic steel linear motor can only output thrust in one direction, that is, it can only drive the load to move with one degree of freedom
Method used
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Embodiment Construction
[0025] Specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0026] Such as Figure 4 As shown, a linear motor 200 with a rotational degree of freedom movement function includes two back irons 203a, 203b arranged in parallel and spaced along the Z-axis direction, and a magnetic steel array arranged on the parallel inner walls of the back irons 203a, 203b 202a, 202b, and the three-phase coils 201a, 201b, 201c located between the two magnetic steel arrays 202a, 202b, the magnetization direction of the magnetic steel in the magnetic steel arrays 202a, 202b is perpendicular to the Z-axis direction Through the magnetic steel, the magnetization direction of the adjacent magnetic steel is opposite, and a closed magnetic field is formed between the magnetic steel arrays 202a, 202b, and the closed magnetic field passes through the effective sections of the three-phase coils 201a, 201b, 201c vertically, and the c...
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The invention discloses a linear motor, a motion platform and a photoetching device. The linear motor comprises magnetic steel arrays arranged in parallel along a Z-axis direction, and a three-phase coil located between two magnetic steel arrays, wherein the magnetic steel arrays are composed of a plurality of magnetic steels arranged in parallel along an X-axis direction; each magnetic steel array is divided into two rows of parallel magnetic steel groups along a Y-axis direction, the adjacent magnetic steels at the same row are spaced in tau, and the magnetic steels in one of the magnetic steel groups and the magnetic steels, which are adjacent to the magnetic steels in one of the magnetic steel groups, in other corresponding magnetic steel group are arranged in a staggered manner along the X-axis direction. Compared with the prior art, the linear motor has an additional controllable rotational degree of freedom while maintaining a linear motion function, the motion of the rotational degree of freedom can be additionally realized. The motor disclosed by the invention is suitable for replacing a workplace which adopts the differential motion of two linear motors to realize the rotational degree of freedom in a small range; and the linear motion and rotational degree of freedom functions can be realized as well under the condition of omitting one linear motor.
Description
technical field [0001] The invention relates to the field of integrated circuit equipment manufacturing, in particular to a linear motor capable of both linear motion and rotational motion, as well as a motion table and a photolithography device including the linear motor. Background technique [0002] Linear motors are mostly used as electric motors, and are increasingly widely used in the field of linear transmission due to their high transmission efficiency compared with rotary motors. A side view schematic diagram of a common bilateral magnetic steel linear motor is shown in figure 1 100 is the bilateral magnetic steel linear motor; 101a, 101b, and 101c are the three-phase coils of the motor; 102a, 102b are the upper and lower layer magnetic steel arrays of the motor; 103a, 103b are the upper and lower layer The back iron of the magnetic steel array plays the role of fixing the magnetic steel array and optimizing the magnetic field distribution. The top view schematic ...
Claims
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IPC IPC(8): H02K41/02
Inventor 张霖胡兵季汉川
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD