A cryopump system with regenerative function

A cryopump system and cryopump technology, applied to pumps, pump components, variable capacity pump components, etc., can solve problems such as triggering water leakage, damage to the machine, and increased design difficulty, achieving fast sublimation and improved regeneration effects
CN106704145BActive Publication Date: 2019-02-19SHANGHAI HUALI MICROELECTRONICS CORP
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
SHANGHAI HUALI MICROELECTRONICS CORP
Publication Date
2019-02-19

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Abstract

The invention discloses a low-temperature pump system with a regenerating function. The low-temperature pump system comprises a cold pump shell, a cold head, a cold pump control module and a heating module, wherein the cold head is positioned in the cold pump shell, and is used for adsorbing gas in the cold pump shell in a vacuum state, and gas covers the cold head after being condensed; the cold pump control module is used for controlling a vacuum adsorbing process of a low-temperature pump and a regenerating process of the low-temperature pump; the heating module is arranged in the cold pump shell; and in the regenerating process of the low-temperature pump, the heating module is used for heating the cold pump shell to prevent heat transmission from being quickened due to the fact that nitrogen gas is introduced in the regenerating process of the low-temperature pump, and therefore, the temperature of the cold pump shell is prevented from being lower than the environment temperature to generate condensed water.
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Description

technical field

[0001] The invention belongs to the field of semiconductor technology equipment manufacturing, in particular to a cold pump (cryopump) system with regeneration function. Background technique

[0002] A cryopump is a vacuum-obtaining device that uses a low-temperature surface to condense, adsorb, and trap gases. It has the advantages of cleanness and oil-free, high pumping speed, and is widely used in semiconductor, integrated circuit, and space technology research.

[0003] see figure 1 , figure 1 Shown is a schematic structural diagram of a cryopump in the prior art. As shown in the figure, the cryopump mainly includes a cold pump housing 1 , a cold head 2 and a control module 3 . When the cryopump adopts the cold head 2 to adsorb, it works in a vacuum state. After the adsorption work is carried out for a period of time, the cold head 2 is covered by solid gas condensed, the surface temperature rises, the adsorption effect on the gas is weakened or even s...

Claims

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