A cryopump system with regenerative function
A cryopump system and cryopump technology, applied to pumps, pump components, variable capacity pump components, etc., can solve problems such as triggering water leakage, damage to the machine, and increased design difficulty, achieving fast sublimation and improved regeneration effects
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[0013] Embodiments embodying the features and advantages of the present invention will be described in detail in the following description. It should be understood that the invention can have various changes in different examples without departing from the scope of the invention, and that the descriptions and illustrations therein are illustrative in nature rather than limiting the invention.
[0014] The structure of a cryopump system with regeneration function of the present invention will be further described in detail through specific embodiments below in conjunction with the accompanying drawings.
[0015] see figure 2 , figure 2 It is a schematic structural diagram of a cryopump system with regeneration function in an embodiment of the present invention. As shown in the figure, the cryopump mainly includes a cold pump casing 1, a cold head 2, a cold pump control module 3 and a heating module. The cold head 2 is located in the cold pump housing 1 and is used to absor...
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