Error compensation method for alignment platform
An error compensation and alignment platform technology, applied in metal processing equipment, automatic control devices, metal processing mechanical parts, etc., can solve the problems that UVW platform cannot meet the accuracy requirements, and the accuracy of the alignment platform cannot meet high-precision production and processing.
Active Publication Date: 2017-05-31
CHENGDU VISTAR OPTEOLECTRONICS CO LTD
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Problems solved by technology
[0002] In the process of production and processing, when the traditional alignment platform is used for alignment, the accuracy of the alignment platform sometimes cannot meet the needs of high-precision production and processing
The UVW platform is a kind of alignment platform that can realize the three-axis movement of X, Y, and θ in the plane. Taking the UVW platform as an example, if the factory precision of the UVW platform is ±0.004mm, the precision requirement for production and processing is ±0.002mm. At this time, the UVW platform cannot meet the accuracy requirements
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[0033] In order to facilitate the understanding of the present invention, the error compensation method of the alignment platform will be more fully described below with reference to the relevant drawings. The preferred embodiment of the error compensation method for the alignment platform is given in the accompanying drawings. However, the error compensation method for the alignment stage can be implemented in many different forms, and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the error compensation method of the alignment platform more thorough and comprehensive.
[0034] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the technical field of the invention. The terminology used herein in the description of the error compensation method of the alignment platform is only for the purp...
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The invention relates to an error compensation method for an alignment platform. According to the method, data for compensation are obtained in the test step, travel compensation is performed according to the data obtained in the test step and the preset travel in the compensation step, and thus the precision of the alignment platform is improved. Specifically, according to the difference between deltaXn and deltaXm as well as the difference between n1 and m1, the linear variation relation between the first direction machining error and the travel can be obtained and is used for compensating the first direction machining error. In a similar way, according to the difference between deltaYn and deltaYm as well as the difference between n2 and m2, the linear variation relation between the second direction machining error and the travel can be obtained and is used for compensating the second direction machining error. DeltaX and deltaY are average values of return errors and can be used for compensating the return errors during reverse movement of the platform. With the method, the machining errors and the return errors during movement of the platform are compensated, so that the precision of the alignment platform is improved.
Description
technical field [0001] The invention relates to the technical field of mechanical alignment, in particular to an error compensation method for an alignment platform. Background technique [0002] In the process of production and processing, when the traditional alignment platform is used for alignment, the accuracy of the alignment platform sometimes cannot meet the needs of high-precision production and processing. The UVW platform is a kind of alignment platform that can realize the three-axis movement of X, Y, and θ in the plane. Taking the UVW platform as an example, if the factory precision of the UVW platform is ±0.004mm, the precision requirement for production and processing is ±0.002mm. At this time, the UVW platform cannot meet the accuracy requirements. Contents of the invention [0003] Based on this, it is necessary to provide an error compensation method for an alignment platform that can improve machining accuracy in view of the above technical problems. ...
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Login to View More IPC IPC(8): B23Q15/14
CPCB23Q15/14
Inventor 杨阳张迪崔永鑫杨硕
Owner CHENGDU VISTAR OPTEOLECTRONICS CO LTD