A preparation method of GAAS/GE/GAAS heterogeneous spin diode for loop antenna

A loop antenna and diode technology, which is applied in semiconductor/solid-state device manufacturing, semiconductor devices, electrical components, etc., can solve the problems of large injection dose and energy, impact concentration, and high equipment requirements, so as to suppress the impact and improve the breakdown voltage. Effect
CN106783595BActive Publication Date: 2019-12-10QIXING INTELLIGENT TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
QIXING INTELLIGENT TECH CO LTD
Publication Date
2019-12-10

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Abstract

A method for preparing a GaAs / Ge / GaAs heterogeneous SPiN diode applied to an annular antenna, comprising: selecting a GeOI substrate (101); etching a top layer Ge layer of the GeOI substrate (101) to form a first trench and a second trench in the top layer Ge layer; depositing a GaAs material (1001) in the first trench and the second trench; using an ion implantation process to perform P-type ion implantation on the GaAs material (1001) in the first trench, so as to form a P-type active region (1301), and performing N-type ion implantation on the GaAs material (1001) in the second trench to form an N-type active region (1302); and forming lead holes (1601) on the surfaces of the P-type active region (1301) and the N-type active region (1302) and performing metal sputtering to form a GaAs / Ge / GaAs heterogeneously structured SPiN diode.
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Description

technical field

[0001] The invention relates to the technical field of manufacturing semiconductor devices, in particular to a method for preparing a GaAs / Ge / GaAs heterogeneous SPiN diode used for a loop antenna. Background technique

[0002] In recent years, wireless communication technology has developed rapidly, and the system has higher and higher requirements for antenna performance. Large-capacity, multi-function, and ultra-wideband are important directions for the development of wireless communication systems at present. However, as the number of antennas used increases, the overall cost and weight of the communication system also increases, and it will cause problems in electromagnetic compatibility. The phased array antenna with relatively mature technology has the disadvantages of complex feed network, the need to add phase shifters, and the resulting high cost and high technical difficulty. Reconfigurable antennas operate under this background.

[0003] The rec...

Claims

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