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Amplified Piezo Actuator with Coarse Adjustment

A technology for actuators and amplifiers, applied in piezoelectric devices/electrostrictive devices, piezoelectric effect/electrostrictive or magnetostrictive motors, generators/motors, etc. Voltage regulation electric drive fine-tuning and other issues

Active Publication Date: 2019-06-07
THORLABS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, for applications such as manipulating the beam in the mirror frame, the existing equipment cannot have both millimeter-level coarse adjustment and piezoelectric-driven fine-tuning from sub-micron to hundreds of microns.

Method used

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  • Amplified Piezo Actuator with Coarse Adjustment
  • Amplified Piezo Actuator with Coarse Adjustment
  • Amplified Piezo Actuator with Coarse Adjustment

Examples

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Embodiment Construction

[0020] The description of illustrative embodiments in accordance with the principles of the invention is intended to be read in conjunction with the accompanying drawings, which are to be considered a part of the entire written description. Therefore, in the description of the embodiments of the present disclosure, references to any direction or orientation are only for convenience of description and do not limit the scope of the present invention in any way. Related terms such as "lower", "higher", "horizontal", "vertical", "above", "below", "upper", "lower", "top" and "bottom" and their derivatives (such as "Horizontally", "downwardly", "upwardly", etc.) should be construed as referring to an orientation as subsequently described or as shown in the figure in question. Unless expressly indicated, these relative terms are for convenience of description only and do not require that the device described be installed or operated in a particular orientation. Unless expressly desc...

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Abstract

The invention provides three design variants of a piezoelectric actuator that integrates coarse adjustment of threaded rods and fine adjustment of mechanically amplified piezoelectric actions. A mechanical amplifier accommodates one or more preloaded piezoelectric stacks along the longitudinal axis to translate displacement along the transverse axis perpendicular to the displacement of the piezoelectric stack by several orders of magnitude. The output stroke of the piezoelectric amplifier is transmitted to a threaded rod with a ball at the end to push the position adjustment and displacement transformation of the set surface, such as mirror frame and other applications.

Description

[0001] Cross References to Related Applications [0002] This application claims priority to US Provisional Application Serial No. 62 / 037,997, filed August 15, 2014, the contents of which are hereby incorporated by reference. This application also claims priority to US Provisional Application Serial No. 62 / 050,814, filed September 16, 2014, the contents of which are hereby incorporated by reference. technical field [0003] The present invention generally relates to piezoelectric actuators. More specifically, the present invention relates to amplified piezoelectric actuators with coarse adjustment. Background technique [0004] Piezoelectric stacks provide limited displacement by varying the applied voltage when excited. Flexure-based mechanical structures have been developed and are commonly used for iterative amplification up to displacements on the order of 100 microns along the lateral direction of piezoelectric expansion. However, for applications such as manipulatin...

Claims

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Application Information

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IPC IPC(8): H01L41/08H02N2/06
CPCG02B7/1827H02N2/043H02N2/101
Inventor S·法蒂M·罗布森K·蒂斯
Owner THORLABS INC
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