Macroscopic inspection machine for substrates

Abstract

The invention provides a macroscopic inspection machine for substrates. The macroscopic inspection machine comprises a rack which is installed between a developing device and a baking device. a supporting part for supporting a glass substrate is installed on the rack; a light source is installed above the supporting part; an air extraction device which can horizontally move along the surface of the glass substrate is installed between the supporting part and the light source on the rack; the air extraction device is driven by a travelling mechanism which is installed between the air extraction device and the rack. Compared with the prior art, through the installation of the air extraction device for adsorbing the particles on the surface of the glass substrate and installed between supporting arms of the glass substrate and the light source and through the driving by the travelling mechanism, particles on the surface of the inspected glass substrate can be absorbed by the air extraction device so as to avoid abnormal products.

Description

technical field [0001] The invention relates to a liquid crystal panel production technology, in particular to a substrate macro inspection machine for inspecting the surface of a glass substrate. Background technique [0002] Today's LTPS (Low Temperature Polysilicon Technology) mobile phone (Mobile) products have higher and higher requirements for product quality, and the control of particles in the product manufacturing process is becoming more and more strict. 2 When the size of the particle is small, it will cause dark spots in the liquid crystal cell, making the product visible to people to be flawed. At present, the process flow of the color filter single process is as follows: the glass substrate passes through the cleaning device-coating device-vacuum drying device-pre-baking device-exposure device-developing device-baking device, and finally the completed glass substrate is obtained. To avoid uneven color of the film surface of the glass substrate, an external dev...

AI Technical Summary

Problems solved by technology

[0002] Today's LTPS (Low Temperature Polysilicon Technology) mobile phone (Mobile) products have higher and higher requirements for product quality, and the control of particles in the product manufacturing process is becoming more and more strict. 2 When the size of the particle is small, it will cause dark spots in the liquid crystal box, making the product visible to people to be flawed

At present, the process flow of the color filter single process is as follows: the glass substrate passes through the cleaning device-coating device-vacuum drying device-pre-baking device-exposure device-developing device-baking device, and finally the completed glass substrate is obtained. To avoid uneven color of the film surface of the glass substrate, an external device will be installed on the yellow light of the color film (that is, between the developing device and the baking device) to conduct a sampling inspection of the product's macroscopic color unevenness, referred to as macro. This device requires personnel Enter the equipment to operate, manually operate the rotating stage, the light on the stage shines on the glass substrate, and use human eyes to observe whether there is uneven color on the film surface on the product, so as to judge the quality of the glass substrate. However, it is easy for the operator to bring in particles to contaminate the glass substrate and cause product abnormalities.

Images