Vacuum system performance degradation measurement method based on roots pump failure mode

A vacuum system and failure mode technology, applied in the direction of pumps, pump control, rotary piston pumps, etc., can solve problems that are not intuitive and cannot obtain online information about vacuum system performance degradation, etc., and achieve the convenience of performance degradation. Effect

Inactive Publication Date: 2017-08-11
张权
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  • Description
  • Claims
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Problems solved by technology

This method cannot obtain information about the performan...

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  • Vacuum system performance degradation measurement method based on roots pump failure mode
  • Vacuum system performance degradation measurement method based on roots pump failure mode
  • Vacuum system performance degradation measurement method based on roots pump failure mode

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Embodiment Construction

[0020] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. The components of the embodiments of the invention generally described and illustrated in the figures herein may be arranged and designed in a variety of different configurations. Accordingly, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely represents selected embodiments of the invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without making creative efforts belong to the protection scope of the present invention.

[0021] It should be noted that like numerals and let...

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Abstract

The invention provides a vacuum system performance degradation measurement method based on a roots pump failure mode, and belongs to the field of vacuum systems. The method comprises the steps of: determining the relation between the pressure in a vacuum container and the working time of a roots pump according to a roots pump working model in a vacuum system, a first wear height of a bearing of a first rotor of the roots pump, a second wear height of the first rotor and a third wear height of the first rotor. The performance degradation degree of the vacuum system is measured according to the vacuum degree acquired in the vacuum container in real time and the determined relation between the pressure in the vacuum container and the working time of the roots pump. The method can obtain the performance degradation degree of the vacuum system online; and compared with a traditional vacuum system performance degradation measurement method, the method is higher in intuition, is effectively convenient for users to timely know the performance degradation degree of the vacuum system, and maintains the roots pump.

Description

technical field [0001] The invention relates to the field of vacuum systems, in particular to a method for measuring performance degradation of a vacuum system based on a failure mode of a Roots pump. Background technique [0002] The vacuum system is an important part of the space environment simulator. Its function is to make the vacuum container of the space environment simulator reach the required vacuum degree and simulate the vacuum environment of space. The safety and reliability of the vacuum system are important factors to determine whether the space environment simulator can work effectively. The working process of the vacuum system is mainly composed of the following steps in series: the rough pumping subsystem performs rough pumping of the vacuum container—the molecular pump subsystem performs transitional pumping—the high vacuum subsystem performs pumping—the vacuum degree of the vacuum container meets the requirements, Stop pumping. Through the failure mode e...

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Application Information

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IPC IPC(8): F04C28/28F04C25/02F04C18/12
CPCF04C28/28F04C18/126F04C25/02F04C2270/16F04C2270/86
Inventor 张权
Owner 张权
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