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Air bearing

A technology of carrier and air flotation, which is applied in the direction of instruments, measuring instrument components, measuring devices, etc., can solve the problems of difficult to maintain the level effect of the substrate, precise detection, easy accumulation of airflow, and bulging of the substrate.

Active Publication Date: 2020-07-17
UTECHZONE CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the airflow flowing out from the air outlet is easy to accumulate between the air bearing platform and the substrate, and especially the airflow in the middle of the air bearing platform is surrounded by the airflow at the outer part, so it is not easy to spontaneously dissipate to the outside
In this way, the accumulation of airflow in the middle of the air bearing platform causes the middle of the substrate to bulge, making it difficult to maintain the horizontal effect of the substrate for precise inspection

Method used

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Embodiment Construction

[0035] figure 1 is a schematic diagram of an air bearing platform according to an embodiment of the present invention. Please refer to figure 1 , in this embodiment, the air bearing platform 100 a includes a bottom layer 110 and a top layer 130 , and the top layer 130 is disposed above the bottom layer 110 . That is to say, the air bearing platform 100a is a double-layer structure composed of a bottom layer 110 and a top layer 130, wherein the bottom layer 110 and the top layer 130 are stacked together in sequence and fixed by fixing members (such as screws). Moreover, the air bearing stage 100a is suitable for providing airflow for carrying a substrate (not shown), such as glass or other objects to be inspected, so as to perform precise inspection on the substrate.

[0036] Specifically, in this embodiment, the air bearing platform 100a further includes a first airflow path and a second airflow path. The airflow is adapted to flow from the bottom layer 110 to the outside o...

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Abstract

The present invention provides an air flotation stage comprising at least a bottom layer and a top layer. The bottom layer has a first opening, a plurality of first channels, and a plurality of through holes. The top layer is disposed above the bottom layer and has a plurality of first air holes and a plurality of second air holes arranged in an array. The first opening communicates with the first air hole via the first passage to form a first air flow path. The through hole is correspondingly communicated with the second air hole to form a second air flow path. The airflow flows from the bottom layer to the outside of the top layer via one of the first airflow path and the second airflow path or from the top layer to the outside of the bottom layer via the other of the first airflow path and the second airflow path. The air flotation stage of the present invention is suitable for providing an air flow bearing substrate and for maintaining a horizontal effect of the substrate.

Description

technical field [0001] The invention relates to a testing platform, in particular to an air bearing platform for testing. Background technique [0002] In recent years, with the increasingly developed technology industry, electronic products have frequently appeared in daily life. Among them, the precision of parts used in electronic products is also a major consideration. Therefore, related detection instruments will be produced accordingly. For example, inspection instruments for inspecting substrates (such as glass) or other objects to be inspected usually need to be equipped with a stage, so that the substrate is arranged on the stage for related inspection. However, if the substrate is directly placed on the stage so as to be in direct contact, the substrate is likely to be damaged. Therefore, part of the current practice is to make the stage into an air-floating stage, so that the substrate is suspended on it. [0003] Furthermore, the air bearing platform is suita...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01D11/00
CPCG01D11/00
Inventor 祁树泰
Owner UTECHZONE CO LTD
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