Auto-focus system and method and optical imaging inspection apparatus
An automatic focus and instrument technology, applied in the field of image detection equipment and automatic focus system, can solve the problem that the object under test cannot be controlled within the depth of field, achieve accurate centroid position, and reduce the effect of the center of mass being left and right
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[0037] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the scope of protection of the present invention.
[0038] figure 1 It is a preferred embodiment of the image inspection apparatus 100 of the present invention, which is used to take an image of the surface of an object 4 and perform defect detection according to the imaged result, so as to find out the defects existing on the object 4 . The image detection instrument 100 includes an auto-focus system 1 , an image capturing unit 2 , an illumination unit 3 and an image detection unit 20 . Wherein, the auto-f...
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