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Testing Equipment

A technology of inspection equipment and movable seat, which is used in measurement devices, optical testing flaws/defects, instruments, etc., and can solve problems such as affecting inspection quality and wafers no longer being flat.

Active Publication Date: 2020-06-19
CHROMA ATE
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a detection device, so as to solve the problem that the wafer is no longer flat during the existing two-way detection, which will affect the detection quality

Method used

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  • Testing Equipment
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Embodiment Construction

[0045] Below in conjunction with accompanying drawing, structural principle and working principle of the present invention are specifically described:

[0046] see Figure 1 to Figure 5 . figure 1 It is a schematic front view of the detection device according to the first embodiment of the present invention. figure 2 for figure 1 The three-dimensional schematic diagram of the horizontal adjustment assembly and the support ring body. image 3 for figure 2 The decomposition diagram. Figure 4 for figure 2 top view diagram. Figure 5 for along Figure 4 The cross-sectional schematic diagram shown by the 5-5 cut surface line.

[0047] The detection device 10 of this embodiment includes a base 100, a rotary table 200, a ring process 300, a level adjustment component 400, a support ring 500, a first image capture device 600, and a second image capture device. The device 700 , an assembly ring body 800 , a light source 850 , two limiting plate parts 910 and a plurality of...

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Abstract

The invention provides a detection apparatus, comprising a base, an annular tool, a horizontal adjustment assembly, a support ring body, a first image acquisition device and a second image acquisitiondevice, wherein the annular tool is arranged on the base and used for fixing a to-be-detected object; the horizontal adjustment assembly comprises a fixed seat, a movable seat and horizontal adjustment members; the fixed seat is fixed on the base and located below the annular tool; the movable seat is locked onto the fixed seat via the horizontal adjustment members; the support ring body is fixedon the movable seat and used for supporting the to-be-detected object; the first image acquisition device and the second image acquisition device are respectively positioned above and below the annular tool; the second image acquisition device faces the first image acquisition device via the support ring body; and at least one horizontal adjustment member can rotate relative to the fixed seat soas to adjust the level of the movable seat.

Description

technical field [0001] The invention relates to a detection device, in particular to a detection device with double detection lenses. Background technique [0002] In the general semiconductor process, when multiple chips are formed on the surface of the wafer, the chips will usually continue to be inspected, detected and classified. Among them, the inspection process mainly uses the inspection lens to scan the chip, and judges whether the chip itself is defective or not based on the captured image. [0003] Wafer inspection is divided into one-way inspection and two-way inspection according to requirements. The part of one-way inspection is to place the wafer flat on the carrier platform, and capture the image of the upper surface of the wafer through the inspection lens above the wafer. Since the entire surface of the wafer is supported by the carrying platform, the wafer is flat and does not affect the inspection quality. The two-way inspection part is to clamp the out...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/95G01N21/01
CPCG01N21/01G01N21/9501G01N2201/103
Inventor 林唯修王胜弘林裕超孙皓格
Owner CHROMA ATE