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Cleaning machine

A cleaning machine and cleaning device technology, which is applied in the direction of conveyor objects, electrical components, semiconductor/solid-state device manufacturing, etc., can solve the problems of manual feeding, single cleaning machine mode, time-consuming and labor-intensive problems, etc.

Active Publication Date: 2018-06-19
CETC BEIJING ELECTRONICS EQUIP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The embodiment of the present invention provides a display panel and a display device to solve the problems of the traditional

Method used

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Embodiment Construction

[0036] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are some of the embodiments of the present invention, but not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0037] Please also see figure 1 and figure 2 , figure 1 A perspective view of a washing machine provided by a preferred embodiment of the present invention, figure 2 for figure 1 Magnification shown at II. Such as figure 1 and figure 2 As shown in , the cleaning machine 100 includes a base 110, a material conveying device 120, a pre-alignment device 130, a first moving mechanism 140, a second moving mechanism 150 and a cleaning device 160, the...

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Abstract

The present invention provides a cleaning machine. By arranging a material conveying device and a pre-aligning device at one side of a cleaning device, the material conveying device provides a material, the pre-aligning device limits the material at a pre-aligning position, a first moving mechanism moves the material from a to-be-grasped position on the material conveying device to the pre-aligning position on the pre-aligning device, and then a second moving device takes and puts the material between the pre-aligning position and the cleaning device, so that the material is conveyed and cleaned automatically instead of being fed and taken artificially and being monitored during the whole course, the intelligentization of the device and the material cleaning efficiency are improved, the cleaning work of a lot of materials can be covered, and the labors and the man-hours can be reduced effectively.

Description

technical field [0001] The invention relates to the field of wafer cleaning machines, in particular to a cleaning machine. Background technique [0002] Under the environment of rapid expansion of high-tech industries, the rapid development of semiconductor production and processing and its supporting industries has led to an increasing demand for wafer cleaning machines. However, with the sharp increase in the output of wafer processed products, maintenance costs, especially labor costs, have gradually increased. Taking the dicing machine as an example, the dicing machine is roughly divided into two types: semi-automatic and fully automatic. However, only the fully automatic type has the function of cleaning wafers, and the price is expensive. Some manufacturers are inconvenient to purchase fully automatic dicing machines considering the procurement budget, processing fields, and process parameters. Such phenomena have led to the emergence of cleaning machines with a sing...

Claims

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Application Information

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IPC IPC(8): H01L21/67H01L21/677
CPCH01L21/67023H01L21/67259H01L21/67742
Inventor 吕超李长城孟庆嵩秦江崔岳刘凯赵婉云
Owner CETC BEIJING ELECTRONICS EQUIP