A positioning device for milling and chamfering ito planar targets and its application method

Abstract

The present invention relates to the field of ITO planar target production equipment, specifically a positioning device for ITO planar target milling and chamfering and its use method. The positioning device includes a placement base for connecting with a grinding machine. The placement base includes a placement platform for placing planar targets, and the placement base also includes a first limiting platform whose side is connected to the placement platform; the placement platform is provided with a first inclined surface; the bottom of the first inclined surface The end is set close to the first limiting platform; the positioning device also includes a fixing assembly used in conjunction with the placement platform to fix the planar target, the fixing assembly includes a fixing platform, and the fixing platform is provided with a The corresponding second inclined surface. The invention provides a tooling for grinding and chamfering a plane target, in which a first inclined surface is arranged on a placement platform, so that the chamfering of the side of the plane target can be realized.

Description

technical field [0001] The invention relates to the field of production equipment for ITO planar targets, in particular to a positioning device for milling and chamfering ITO planar targets and a method for using the same. Background technique [0002] For the ITO planar finished target, sometimes it is necessary to grind the surface and four sides of the planar ITO target to the specified size, and at the same time chamfer the edge of the planar target, and the chamfering of the planar target is generally performed by milling. Now the normal planar ITO target is ground on the magnetic table of the grinding machine. The grinding wheel of the surface grinding machine is parallel to the magnetic table of the grinding machine. Since the grinding wheel and the magnetic table of the grinding machine cannot adjust the angle, it is necessary to design a kind of ITO planar target that can be used to place it. And make it reach the required grinding angle tooling. At the same time, b...

AI Technical Summary

Problems solved by technology

[0002] For the ITO planar finished target, sometimes it is necessary to grind the surface and four sides of the planar ITO target to the specified size, and at the same time chamfer the edge of the planar target, and the chamfering of the planar target is generally performed by milling. Now the normal planar ITO target is ground on the magnetic table of the grinding machine. The grinding wheel of the surface grinding machine is parallel to the magnetic table of the grinding machine. Since the grinding wheel and the magnetic table of the grinding machine cannot adjust the angle, it is necessary to design a kind of ITO planar target that can be used to place it. And make it reach the required grinding angle tooling. At the same time, because the ITO target is fragile and expensive, the fixture tooling for placing the ITO target is easy to cause chipping and cracking of the target. Therefore, a protective The positioning tooling is also needed now

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