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Thermal mass flow sensor, manufacturing method thereof, and thermal mass flowmeter

A mass flow and manufacturing method technology, applied in the direction of measuring flow/mass flow, volume flow ratio measurement, volume measurement, etc., can solve problems such as hindering the movement of heat, decreasing the resistance value of sensor wires, and decreasing the sensitivity of process gas heating flow sensors, etc. , to achieve the effect of reducing heat conduction, reducing condensation and deterioration

Active Publication Date: 2020-09-04
HITACHI METALS LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

When such electrical contact occurs, the resistance value of the sensor wire decreases, making it difficult to heat the process gas by energizing the sensor wire, and the sensitivity as a flow sensor decreases.
In addition, a gap is created between the sensor tube and the sensor wire, which hinders the transfer of heat, making it difficult to heat the process gas by energizing the sensor wire, and reducing the sensitivity as a flow sensor.

Method used

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  • Thermal mass flow sensor, manufacturing method thereof, and thermal mass flowmeter
  • Thermal mass flow sensor, manufacturing method thereof, and thermal mass flowmeter
  • Thermal mass flow sensor, manufacturing method thereof, and thermal mass flowmeter

Examples

Experimental program
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Effect test

no. 1 Embodiment approach 》

[0066] Hereinafter, a thermal mass flow sensor (hereinafter sometimes referred to as "first sensor") according to a first embodiment of the present invention will be described with reference to the drawings.

[0067] (structure)

[0068] like Figure 1 ~ Figure 4 As shown, the first sensor 10 has a sensor tube 12, a pair of sensor wires 13 (13a and 13b) wound around the sensor tube 12, only in image 3 ) and a covering layer (not shown) that covers at least the portion of the sensor wire 13 that is wound around the sensor tube 12. In this regard, the first sensor 10 has the same characteristics as a general thermal mass flow sensor. structure.

[0069] The sensor tube 12 is a measurement condition that is inactive with respect to the measured fluid flowing in the sensor tube 12 (for example, the process gas supplied to the chamber in the semiconductor manufacturing process) and can withstand the mass flow rate of the measured fluid ( Such as temperature and pressure, etc.) ...

no. 2 Embodiment approach 》

[0102] Hereinafter, a method of manufacturing a thermal mass flow sensor according to a second embodiment of the present invention (hereinafter sometimes referred to as "first method") will be described with reference to the drawings.

[0103] The thermal mass flow sensor manufactured by the first method is the thermal mass flow sensor of the present invention represented by the above-mentioned first sensor 10 . Therefore, the structure of the thermal mass flow sensor manufactured by the first method has already been described in the description of the thermal mass flow sensor of the present invention, and therefore, the description will not be repeated here.

[0104] The first method includes the first to fifth steps as described above. The first to fifth steps will be described in detail below. However, the method for manufacturing a thermal mass flow sensor of the present invention may include steps other than the first to fifth steps according to, for example, the structu...

no. 3 Embodiment approach 》

[0159] As described above, the present invention also relates to a thermal mass flowmeter using the thermal mass flow sensor of the present invention. Hereinafter, a thermal mass flowmeter (hereinafter sometimes referred to as "first flowmeter") according to a third embodiment of the present invention will be described with reference to the drawings.

[0160] Figure 9 It is a schematic front view of the first flowmeter viewed from a direction perpendicular to the axis of the fluid flow path provided in the base. Figure 10 From Figure 9 A schematic side view of the first flowmeter viewed in the direction of the arrow A shown. Figure 11 From Figure 9 A schematic plan view (top view) of the first flowmeter viewed in the direction of the arrow B shown.

[0161] exist Figure 9 ~ Figure 11 In the figure, in order to facilitate understanding of the structure of the first flowmeter 1, the flow path 2d, the bypass 3, the sensor tube 12, the sensor line 13a, the sensor line 1...

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Abstract

Thermal mass flow rate that is enclosed in an airtight container (11) in an inert atmosphere for the purpose of suppressing the disappearance of the covering layer of the sensor wire (13a) and the sensor wire (13b) accompanying use at high temperature In the sensor (10), there is also an exhaust pipe (16), and the exhaust pipe (16) makes the airtight container (11) A tube that airtightly communicates the interior space with the exterior. An end portion of the exhaust pipe (16) opposite to the exhaust hole (16a) is sealed by plastic deformation to form a sealing portion (16b). Thereby, after forming the airtight container (11) in a normal atmospheric atmosphere, the internal space of the airtight container (11) can be hermetically sealed. The sealing portion (16b) may be further sealed by welding. In this way, the airtight container (11) can be assembled easily and with high precision, and the airtightness of the airtight container (11) can be suppressed from decreasing due to use at high temperatures.

Description

technical field [0001] The present invention relates to a thermal mass flow sensor, a manufacturing method of the thermal mass flow sensor, and a thermal mass flow meter using the thermal mass flow sensor. More specifically, the present invention relates to a thermal mass flow sensor having improved high-temperature durability of a coating layer of a sensor wire, a method of manufacturing the thermal mass flow sensor, and a thermal mass flow meter using the thermal mass flow sensor . Background technique [0002] Mass flow sensors are widely used for the purpose of detecting the mass flow rate of a process gas supplied into a chamber, for example, in a semiconductor manufacturing process. Various types of mass flow sensors are known in this technical field. Among them, thermal mass flow sensors are widely used because they can accurately measure the mass flow rate of a process gas with a relatively simple structure. [0003] A thermal mass flow sensor generally includes a ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01F1/684G01F1/69
CPCG01F1/684G01F5/00G01F15/18G01F1/688G01F1/69G01F1/6847
Inventor 佐佐木龙石井守
Owner HITACHI METALS LTD