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Thermal mass flow rate sensor, thermal mass flow rate sensor production method, and thermal mass flow meter using said thermal mass flow rate sensor

A technology of mass flowmeter and mass flow, which is applied in the direction of measuring flow/mass flow, volume flow ratio measurement, and measurement capacity, etc., and can solve the problems of hindering the movement of heat, decreasing the resistance value of sensor wires, and decreasing the sensitivity of process gas heating flow sensors, etc. problem, achieve the effect of reducing condensation and deterioration, and reducing heat conduction

Active Publication Date: 2018-11-09
HITACHI METALS LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

When such electrical contact occurs, the resistance value of the sensor wire decreases, making it difficult to heat the process gas by energizing the sensor wire, and the sensitivity as a flow sensor decreases.
In addition, a gap is created between the sensor tube and the sensor wire, which hinders the transfer of heat, making it difficult to heat the process gas by energizing the sensor wire, and reducing the sensitivity as a flow sensor.

Method used

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  • Thermal mass flow rate sensor, thermal mass flow rate sensor production method, and thermal mass flow meter using said thermal mass flow rate sensor
  • Thermal mass flow rate sensor, thermal mass flow rate sensor production method, and thermal mass flow meter using said thermal mass flow rate sensor
  • Thermal mass flow rate sensor, thermal mass flow rate sensor production method, and thermal mass flow meter using said thermal mass flow rate sensor

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Experimental program
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Effect test

no. 1 Embodiment approach 》

[0066] Hereinafter, a thermal mass flow sensor (hereinafter sometimes referred to as "first sensor") according to a first embodiment of the present invention will be described with reference to the drawings.

[0067] (structure)

[0068] like Figure 1 ~ Figure 4 As shown, the first sensor 10 has a sensor tube 12, a pair of sensor wires 13 (13a and 13b) wound around the sensor tube 12, only in image 3 ) and a covering layer (not shown) that covers at least the portion of the sensor wire 13 that is wound around the sensor tube 12. In this regard, the first sensor 10 has the same characteristics as a general thermal mass flow sensor. structure.

[0069] The sensor tube 12 is a measurement condition that is inactive with respect to the measured fluid flowing in the sensor tube 12 (for example, the process gas supplied to the chamber in the semiconductor manufacturing process) and can withstand the mass flow rate of the measured fluid ( Such as temperature and pressure, etc.) ...

no. 2 Embodiment approach 》

[0102] Hereinafter, a method of manufacturing a thermal mass flow sensor according to a second embodiment of the present invention (hereinafter sometimes referred to as "first method") will be described with reference to the drawings.

[0103] The thermal mass flow sensor manufactured by the first method is the thermal mass flow sensor of the present invention represented by the above-mentioned first sensor 10 . Therefore, the structure of the thermal mass flow sensor manufactured by the first method has already been described in the description of the thermal mass flow sensor of the present invention, and therefore, the description will not be repeated here.

[0104] The first method includes the first to fifth steps as described above. The first to fifth steps will be described in detail below. However, the method for manufacturing a thermal mass flow sensor of the present invention may include steps other than the first to fifth steps according to, for example, the structu...

no. 3 Embodiment approach 》

[0159] As described above, the present invention also relates to a thermal mass flowmeter using the thermal mass flow sensor of the present invention. Hereinafter, a thermal mass flowmeter (hereinafter sometimes referred to as "first flowmeter") according to a third embodiment of the present invention will be described with reference to the drawings.

[0160] Figure 9 It is a schematic front view of the first flowmeter viewed from a direction perpendicular to the axis of the fluid flow path provided in the base. Figure 10 From Figure 9 A schematic side view of the first flowmeter viewed in the direction of the arrow A shown. Figure 11 From Figure 9 A schematic plan view (top view) of the first flowmeter viewed in the direction of the arrow B shown.

[0161] exist Figure 9 ~ Figure 11 In the figure, in order to facilitate understanding of the structure of the first flowmeter 1, the flow path 2d, the bypass 3, the sensor tube 12, the sensor line 13a, the sensor line 1...

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Abstract

For a thermal mass flow rate sensor 10 enclosed in a sealed container 11 having an inert atmosphere for the purpose of suppressing the loss of covering layers of sensor wires 13a, 13b associated withhigh-temperature use, an exhaust pipe 16 is further provided that causes the inner space of the sealed container 11 and the outside to be in airtight communication with each other via an exhaust hole16a that is a through-hole formed in the outer wall of the sealed container 11. The end part on the opposite side of the exhaust pipe 16 from the exhaust hole 16a is sealed through plastic deformationso as to form a sealed part 16b. As a result, it is possible to airtightly close the internal space of a sealed container 11 after forming the sealed container 11 in a normal atmosphere. The sealed part 16b may be further sealed through welding. In this way, it is possible to assemble a sealed container 11 simply and with a high degree of accuracy and suppress reduction in the airtightness of thesealed container 11 associated with high-temperature use.

Description

technical field [0001] The present invention relates to a thermal mass flow sensor, a manufacturing method of the thermal mass flow sensor, and a thermal mass flow meter using the thermal mass flow sensor. More specifically, the present invention relates to a thermal mass flow sensor having improved high-temperature durability of a coating layer of a sensor wire, a method of manufacturing the thermal mass flow sensor, and a thermal mass flow meter using the thermal mass flow sensor . Background technique [0002] Mass flow sensors are widely used for the purpose of detecting the mass flow rate of a process gas supplied into a chamber, for example, in a semiconductor manufacturing process. Various types of mass flow sensors are known in this technical field. Among them, thermal mass flow sensors are widely used because they can accurately measure the mass flow rate of a process gas with a relatively simple structure. [0003] A thermal mass flow sensor generally includes a ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01F1/684G01F1/69
CPCG01F1/684G01F5/00G01F15/18G01F1/688G01F1/69G01F1/6847
Inventor 佐佐木龙石井守
Owner HITACHI METALS LTD