A liquid metal drive control system and control method integrating micropump and microvalve
A liquid metal, drive control technology, applied in pump control, liquid fuel engines, components of pumping devices for elastic fluids, etc. Metal electrical blocking effect and other issues to achieve the effect of improving control and fluidity
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[0064] In a specific embodiment of the present invention, the liquid metal 1 drive control system integrating micropumps 4 microvalves provided by the present invention is used in the field of radio frequency antennas. Taking a frequency reconfigurable monopole antenna as an example, the traditional monopole The metal copper in the sub-antenna is replaced with liquid metal 1.
[0065] (1) The substrate of the radio frequency antenna and the flow channel structure of the liquid metal 1 are prepared by using PDMS, and the cross section of the flow channel structure adopts a rectangular cross section.
[0066] (2) The PDMS cover plate and the base structure are sealed by a plasma method to form a flexible micro-channel 2 for the radio frequency antenna.
[0067] (3) The micropump and the microvalve are respectively integrated with the flexible microchannel 2 of the radio frequency antenna to form an integrated micropump 4 and an integrated microvalve 5 .
[0068] (4) Fill the liqu...
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