198 results about "Proportioning valve" patented technology

The invention discloses a self-adaptive parameter control system and method for a halfpace field rice transplanter based on full-hydraulic transmission, particularly relates to the technical field of hydraulic parameter control, and aims to solve the technical problem of dynamic power competition between a walking system and a planting device when the full-hydraulic transmission rice transplanter works in a halfpace field. Working pressure signals of a walking motor and a planting device are monitored in real time, the divergence degree of envelope lines of the two pressure signals is calculated so as to recognize the power competition state of a system, and when power competition is detected, the required power of two execution mechanisms is dynamically calculated, and a hydraulic pump displacement distribution coefficient is generated; and then the interaction characteristics of the outlet pressure of the main pump and the output flow signal and the transmission characteristics of the pressure signal of the executing mechanism are fused, the dynamic balance degree of the system is generated, the displacement distribution coefficient is corrected, and finally the opening degree of the walking motor and the proportional valve of the planting device is synchronously adjusted based on the corrected coefficient. Accurate distribution and dynamic balance control of the power of the hydraulic system are achieved.

A mine dump truck wet disc brake hydraulic system, including main control valve, one end of main control valve is connected pressure oil source, the other end is connected front brake system and middle and rear brake system, front brake system includes brake pedal, front axle proportional control valve group, front axle brake valve group and front brake cylinder, middle and rear brake system includes brake pedal, slow running valve, middle and rear axle brake valve, rear axle proportional valve group, relay valve group, rear axle brake cylinder and middle axle brake cylinder, the utility model discloses a mine dump truck wet disc brake hydraulic system can realize manual operation brake and line control remote brake function, reaches unmanned operation's requirement, is used for unmanned vehicle or auxiliary driving, and in order to adapt to the distance of middle and rear axle of three axle vehicle and the distance of main brake valve group is longer, two relay valve groups are added, brake corresponding speed is improved, faster brake response is realized, makes travel more safe.

The utility model provides a rolling and flattening device for copper sheet manufacturing and machining, which belongs to the field of metal sheet machining and comprises a workbench, an adjusting component and a cleaning component. A mounting frame is fixedly mounted on the surface of the workbench, and a plurality of lower roll shafts are rotationally mounted at the bottom of the inner side of the mounting frame; the utility model discloses. A mounting groove is formed in the surface of a mounting frame, a lifting block is slidably mounted in the mounting groove, an adjusting screw is rotatably mounted at the top of the mounting frame, when a rocking wheel is rocked, the adjusting screw is driven to rotate so as to drive the lifting block to ascend and descend in the mounting groove, the lifting block ascends and descends to drive an upper roller shaft to move relative to a lower roller shaft, and therefore the distance between the roller shafts is adjusted; the copper sheets with different thicknesses and sizes are flattened and rolled, the air supply branch pipes are connected with the compression air collection bag through the air proportional valves in the mounting box, air flow is driven by the air blowing nozzles to be quickly blown to the surfaces of the copper sheets, so that particle impurities on the surfaces of the copper sheets are cleaned, and the copper sheets are prevented from being scratched by the particle impurities during rolling.

The application discloses a mechanical control type Venturi premixer and an energy-saving and environment-friendly hot water boiler thereof. The Venturi premixer comprises a premixer main body, an adjusting driving assembly, an adjusting blocking piece and an elastic piece. The premixer main body is provided with an air inlet, an air adjusting opening, a sliding cavity, a gas inlet and a gas adjusting opening. The mixing cavity is provided with a positioning limiting column. The adjusting driving assembly comprises a driving unit and a driving shaft. The adjusting blocking piece comprises a blocking piece body, a gas adjusting blocking ring and an air adjusting blocking ring arranged on the blocking piece body. The driving unit is used for driving the gas adjusting blocking ring and the air adjusting blocking ring to move simultaneously through the driving shaft, so as to adjust the opening degrees of the gas adjusting opening and the air adjusting opening respectively. The premixer adopts a control scheme of mechanical linkage and elastic piece assistance. Through the cooperative matching of the adjusting driving assembly, a fan and a gas proportional valve, the accurate dynamic proportioning of the gas and the air is realized.

The utility model relates to the field of stabilizer bar, especially transverse stabilizer bar's adjustable connecting structure of four -wheel electric vehicle. The utility model discloses stabilizer bar, axle bush and pull rod, stabilizer bar is trapezoidal, and the both ends are punched into the ear piece, axle bush is covered in the middle part of stabilizer bar, and pull rod is provided with two, and is hinged in the both ends of stabilizer bar respectively, and pull rod is installed on the frame, and axle bush is connected with hydraulic device still, and the top of hydraulic device is fixed with bolt and set up on the frame. Axle bush connects hydraulic device, and is electrically connected with automobile ECU and is equipped with electric control proportional valve, can automatically or manually adjust the lateral stabilizer bar roll stiffness according to the intention of driver or road condition. When driving fiercely or high -speed driving, ECU controls electric control proportional valve to adjust hydraulic device output pressure according to sensor group feedback, and the roll stiffness is increased, and the control stability and high -speed driving safety are enhanced.

The application discloses a closed electro-hydraulic variable-pitch system for wind power generation, which comprises a variable-pitch cylinder, an opening and closing pitch unit arranged between a first oil port and a second oil port of the variable-pitch cylinder, a motor, a hydraulic pump, a proportional valve and a connecting pipe for conveying hydraulic oil, the motor is used for driving the hydraulic pump to work, an oil outlet of the hydraulic pump is communicated with a P port of the proportional valve, a T port of the proportional valve is communicated with an oil suction port of the hydraulic pump, and A and B ports of the proportional valve are respectively communicated with the first oil port and the second oil port of the variable-pitch cylinder; internal passages between the A and B ports and the P and T ports of the proportional valve can be cross-converted, and the flow directions of the oil inlet and outlet passages of the hydraulic oil between the first oil port and the second oil port are switched through the proportional valve. The variable-pitch system of the application has the advantages of traditional electric variable-pitch and hydraulic variable-pitch, greatly simplifies the hydraulic oil conveying pipeline, has fewer components, saves installation space, has high safety and has great cost advantage.

The disclosure relates to a valve, e.g., a proportional valve, comprising a main piston for actuating a main volumetric flow and a pilot piston for actuating a pilot volumetric flow. The main piston and the pilot piston are guided in a valve housing in a longitudinally movable manner, and the pilot piston can be actuated using a magnetic device. The position of the main piston can be set using the pilot piston which, based on the movement position thereof, signals the fluid pressure acting on the main piston into a pilot chamber via a fluidic connection or cuts of the fluid connection and connects the pilot chamber to a tank or low-pressure side via another fluidic connection into which a valve is introduced that closes in a leak-proof manner as soon as a fluidic connection is produced between the main piston and the pilot chamber.

This utility model relates to a hydraulic cylinder control system with adjustable displacement speed and intermediate stop capability. It includes a cylinder assembly with a valve group and a controller connected to it. The cylinder assembly includes a cylinder body, a piston rod, and a rear-end rod. A displacement sensor, connected to the rear-end rod via a bracket, is located on the cylinder body side corresponding to the rear-end rod. The displacement sensor and the rear-end rod are connected via a connecting rod. A valve needle is connected to the front end of the piston rod. The displacement sensor obtains the cylinder body's displacement data. The controller adjusts the flow rate of the proportional directional valve and the valve core position based on the cylinder body displacement data to drive the cylinder body to change its displacement speed and achieve intermediate stop of the cylinder movement at any desired position. This allows for differentiated control of the opening and closing of the injection port by valves at different points within the same hot runner system, resulting in smoother injection and venting, and effectively improving the quality of injection molded products.

The invention relates to an integrated two-stage empty and load adjusting device for a railway wagon and a control method thereof, and aims to meet the requirements that an existing stepless adjusting device is complex in pipeline and has multiple leakage points, and a heavy load special line only needs two-stage empty and load adjustment, a proportional valve assembly and a sensing valve assembly are integrated into a whole. Installation arrangement is simplified, and pipeline joints and potential leakage risks are reduced. A proportional valve assembly of the device adjusts the compressed air flow from a brake control valve to a brake cylinder, a sensing valve assembly controls connection and disconnection of the brake cylinder and a pressure reduction air cylinder according to the vehicle load state, and a pressure adjusting assembly controls exhaust of a proportional piston back cavity through the pressure of the pressure reduction air cylinder. The sensing valve assembly opens a brake cylinder and pressure reduction air cylinder passage when the vehicle is empty and closes when the vehicle is loaded, precise two-stage pressure adjustment of empty and loaded working conditions is achieved, and meanwhile structural light weight, arrangement convenience and system reliability are taken into consideration.

The application relates to a gas control vacuum proportional valve, belonging to the field of gas pump pressure regulation, and mainly applied to vacuum pumping after electrolyte is filled into a battery pack of a lithium battery. The gas control vacuum proportional valve comprises a valve head, a valve body and a valve core. The valve head and the valve body enclose a positive pressure cavity connected with a positive pressure gas source. The valve core is provided with an output air channel connected with a vacuum pump and an input air channel connected with a lithium battery device to be vacuumized. The input air channel and the output air channel are selectively connected into a vacuum flow channel through an air port. The valve core is further provided with a containing cavity and a gas control pressure regulating assembly arranged in the containing cavity. The gas control pressure regulating assembly comprises a rubber-coated valve port diaphragm separating the vacuum flow channel and the containing cavity. The valve core is provided with a gas stopping baffle. The gas pressure in the positive pressure cavity can drive the rubber-coated valve port diaphragm and cooperate with the gas stopping baffle to form the air port. The containing cavity is always in a sealed state, so that the problem that corrosive electrolyte is inhaled into the containing cavity along with the gas when the gas control vacuum proportional valve is used to pump vacuum after electrolyte is filled into the battery pack is solved.

The utility model discloses an electric vehicle thermal management system and a vehicle. The electric vehicle thermal management system comprises a refrigerant circulation loop and a cooling liquid circulation loop which share a water-cooling condenser and a cooler. The cooling liquid circulation loop further comprises a battery pack, a motor assembly, a radiator, a water heater, a cold air core body, a warm air core body, a first three-way proportional valve, a second three-way proportional valve and a nine-way valve. A first port of the nine-way valve is connected with the battery pack, a second port is connected with the cold air core and the cooler, a third port is connected with the warm air core and the water-cooling condenser, a fourth port is connected with the first three-way proportional valve, a fifth port is connected with the second three-way proportional valve, and a sixth port and a seventh port are connected with the two ends of the radiator respectively. The sixth port and the eighth port are connected with the two ends of the motor assembly respectively, and the ninth port is connected with the battery pack. The flow path of cooling liquid is switched through the nine-way valve, the first three-way proportional valve and the second three-way proportional valve, different function modes can be achieved, the number of system valves is small, the integration degree is high, and the system is suitable for combustible refrigerants.

The application discloses an electro-hydraulic brake system for controlling vehicle wheel group braking, comprising a parking brake system and a service brake system, and specifically comprising an oil tank, a motor pump group, a two-position two-way electromagnetic reversing valve, a pump outlet pressure gauge, an accumulator liquid charging valve, a two-position three-way electromagnetic reversing valve, a parking brake accumulator, a parking brake pressure gauge, a pressure reducing valve, a service brake accumulator, a pressure sensor, a service brake proportional valve, a motor parking brake, a speed reducer service brake, a vehicle wheel group, a wheel group driving motor, a hydraulic pipeline and an electrical control module. The parking brake system and the service brake system of the electro-hydraulic brake can independently or cooperatively operate, can control the brakes of four wheel groups of the vehicle in real time, can ensure the absolute stop of each wheel group of the vehicle, can maintain the parking of the vehicle under any working conditions such as slopes, can avoid the vehicle from tilting, vibrating and slipping when running due to road conditions, can meet the demand of efficient braking of heavy vehicles, and can improve the safety of the vehicle.

This invention relates to a portable diesel engine proportional valve internal leakage detection system and method, comprising: a pilot valve test plate with a first hole, a second hole, a third hole, and a first fixing hole, wherein the first fixing hole matches the fixing hole of the pilot valve; a main valve test plate with a fourth hole, multiple fifth holes, and a second fixing hole, wherein the second fixing hole matches the fixing hole of the main valve; and a distribution block with a main flow channel inside, an outlet pipe at the outlet end of the main flow channel, a flow detection element at the outlet pipe, and the main flow channel also connecting to a first branch flow channel and a second branch flow channel. Both the inlet ends of the first and second branch flow channels are equipped with switching valves. The switching valve of the first branch flow channel can be connected to the first hole through a pipe, and the switching valve of the second branch flow channel can be connected to the fourth hole through a pipe. The system of this invention reduces detection costs.

A proportional valve arrangement for refrigerant includes a valve body chamber having an inflow opening, a first outflow opening and a second outflow opening. Furthermore, the proportional valve arrangement includes a valve body which is designed to be transferable in the valve body chamber in a longitudinal axis direction between a first sealing seat and a second sealing seat, wherein the valve body opens a first flow path from the inflow opening to the first outflow opening when the valve body bears against the first sealing seat, and opens a second flow path from the inflow opening to the second outflow opening when the valve body bears against the second sealing seat.

A fluid suspension system for a land vehicle is provided with a fluid biasing member with a first fluid port and a second fluid port. The fluid biasing member is adapted to be connected to a chassis and a first axle of a land vehicle spaced apart from a pivotal connection of the first axle to pivot the first axle relative to the chassis upon movement to a first position and a second position. A proportional valve is in fluid cooperation with the first fluid port of the fluid biasing member to permit fluid to flow to the fluid biasing member to bias the fluid biasing member to the first position, and to permit the fluid to flow from the fluid biasing member to the proportional valve, and to the second fluid port of the fluid biasing member to bias the fluid biasing member to the second position.

The application discloses a kind of air-blowing auxiliary solid-state soil conditioner strong discharge uniform application device, which belongs to agricultural machinery.The automatic controller and air pressure transmission system are installed on the frame, and the four material application discharge valves of front and rear rows are concentrically connected in series and connected by a communication pipe.The driven sprocket and driving sprocket are respectively arranged on the left and right sides of the two ends of the double-row material application discharge valves, the speed motor is connected with the driving sprocket, and the two feed hoppers are respectively fixed between the driving sprocket and the right end material application discharge valve of the front row, and the driven sprocket and the left end material application discharge valve of the rear row.The automatic controller is composed of a key module, a microcontroller, motor drive modules, a speed sensor, a communication interface, a voltage linear amplifier, a D / A converter and a display screen.The air pressure transmission system includes an air pressure sensor, an air compressor, an air tank, a filter and an electrical proportional valve.The application realizes continuous forced conveying and uniform discharge of solid-state soil conditioner, and has the characteristics of good uniformity and less blockage.

The application relates to a multi-mode brake system of a special vehicle, which comprises an emergency relay valve, a first relay valve, a second relay valve, an ABS controller, a foot brake valve, a hand brake valve, a normally open electromagnetic valve, a normally closed electromagnetic valve, an electric control proportional valve, a first shuttle valve, a second shuttle valve, a third shuttle valve, an air compressor and a plurality of brake chambers. The application can realize various modes of braking, two-by-two interlocking, automatic switching according to the walking mode of the vehicle, satisfy the overall brake system, can not only guarantee traction braking, but also does not affect the braking work when the vehicle independently walks; and is reasonably designed, can satisfy the integrated brake system of a vehicle under various walking mode states, is complete in function and improves work efficiency.

A gas collection device used by a multifunctional automobile exhaust detection analyzer comprises a power supply module, a filtering device, a cooling device, a peristaltic pump, a pressure sensor, an electric proportional valve and a sampling pump, the filtering device comprises a filter cartridge, a filter screen and a filter cartridge cover, and the cooling device comprises a shell and a semiconductor refrigeration mechanism. An exhaust pipe B of the cooling equipment is connected with the gas inlet end of the automobile exhaust detection analyzer body, the exhaust end of the automobile exhaust detection analyzer body is connected with an inlet of the electric proportional valve, an outlet of the electric proportional valve is connected with an inlet of the sampling pump, and a gas inlet pipe of the pressure sensor P is installed on the exhaust pipe B. The probability that particulate matter blocks a subsequent pipeline and the interior of the automobile tail gas detection analyzer body is reduced, moisture in tail gas can be cooled, the temperature of the tail gas can be reduced, the flow and pressure of the tail gas entering the interior of the automobile tail gas detection analyzer body are stable, and the accuracy of tail gas data detected by the tail gas detection analyzer is guaranteed as much as possible. The device has a good application prospect.

This utility model relates to the field of hydraulic pumping unit technology, and in particular to a one-to-two hydraulic pumping unit, comprising a mounting base plate, with support frames mounted on both the left and right sides of the top front side of the mounting base plate. Servo hydraulic cylinders are installed inside the support frames, and displacement sensors are installed inside the servo hydraulic cylinders. A hydraulic oil tank is bolted to the rear side of the top of the mounting base plate, and a proportional valve and a variable displacement pump motor are bolted to the top of the hydraulic oil tank. An accumulator is connected to the front side of the solenoid valve assembly. The proportional valve controls the two variable displacement pump motors to alternately work to supply oil to the servo hydraulic cylinders at both ends. When one servo hydraulic cylinder rises, the other servo hydraulic cylinder descends, transferring hydraulic energy to the other lifting variable displacement pump motor, causing the servo hydraulic cylinders at both ends to reciprocate. This one-to-two configuration achieves energy recovery and improves production efficiency.

The invention relates to a torque control method, device and system and a program product, and relates to the technical field of driving control. The torque control method comprises the steps that under the condition that the mechanical equipment is in a hill starting state, target braking force of the mechanical equipment is determined according to information of the environment where the mechanical equipment is located and gravity information of the mechanical equipment; according to the target braking force and the operation information of the mechanical equipment, target torque of the mechanical equipment is determined; controlling the initial opening degree of a braking proportional valve of the mechanical equipment to be reduced to zero within a preset time, and controlling the initial torque of the mechanical equipment to be increased to the target torque within the preset time under the condition that an accelerator pedal of the mechanical equipment is in an activated state and the torque corresponding to the opening degree of the accelerator pedal is smaller than the target torque, the sum of the braking force corresponding to the actual opening degree of the braking proportional valve of the mechanical equipment and the driving force corresponding to the actual torque of the mechanical equipment is equal to the target braking force.

This utility model discloses a thin film peeler for irregularly shaped pipe fittings, including a handle, a pipe membrane attached to the outer wall of the handle, a collar that can be fitted onto the outside of the handle, a peeling airbag for peeling the pipe membrane fixed inside the collar, and an air compressor for providing an air source. The output end of the air compressor is connected to a proportional valve via an air pipe. The proportional valve is used to adjust the inflation pressure, and the output end of the proportional valve is connected to the peeling airbag via an air pipe. This utility model uses an inflatable peeling airbag, utilizing the principle of elastic expansion or contraction of the peeling airbag under different pressures to remove the pipe membrane. For cases where the cross-sectional area changes little, the inflation pressure can be directly set; for cases where the cross-sectional area changes significantly, the inflation pressure can be adjusted via the proportional valve. This facilitates manual operation, thereby improving production efficiency and adaptability.

The invention discloses an air tightness detection system for a whole railway vehicle. The air tightness detection system comprises a closed box body, a driving part, a partition plate, a pressure transmission pipe, an air storage tank, an inflation and deflation pump and a controller, the controller is configured to control the driving part to drive the movable plate to move to a specified position relative to the closed box body during static air tightness detection, so that the air pressure in the to-be-detected vehicle is close to a set value; controlling the switch valve and the proportioning valve to enable the air pressure in the to-be-tested vehicle to reach a set value; during dynamic air tightness detection, the switch valve is controlled to be opened and closed periodically, so that dynamic pressure waves are generated in the closed box body. Compared with the prior art, the gas storage tank and the switch valve are periodically opened and closed to generate high-frequency dynamic pressure waves so as to meet the requirement of dynamic gas tightness detection, the static detection function and the dynamic detection function are integrated on the same platform, and gas tightness index integrated evaluation of the whole vehicle under all working conditions is achieved. The limitation that dynamic air tightness test needs real vehicle dynamic adjustment resources is solved, and the cost of air tightness detection is greatly reduced.

This application primarily relates to the field of vehicle motion control technology, specifically to a control method and system for steering a guided vehicle. This application provides a control method for steering a guided vehicle, comprising: acquiring the desired steering angle, desired angular acceleration, and actual steering angle of the guided vehicle; determining a steering angle deviation based on the desired steering angle and the actual steering angle; determining a PID feedback control quantity and a threshold feedforward compensation quantity for the dead zone of the steering proportional valve based on the steering angle deviation; determining an angular acceleration feedforward compensation quantity based on the desired angular acceleration; superimposing the PID feedback control quantity, the threshold feedforward compensation quantity, and the angular acceleration feedforward compensation quantity to obtain a final control quantity; and driving the steering actuator of the guided vehicle to achieve steering based on the magnitude and direction of the final control quantity, thereby improving the dynamic response speed and achieving smooth and rapid full-range control.

The application discloses a high-frequency-response low-power-consumption aerodynamic proportional valve. The application is composed of a torque motor and an aerodynamic rotary valve; the torque motor comprises a permanent magnet, a magnetic conducting yoke, an upper armature, a lower armature, an upper framework, a framework column, a lower framework, an exciting coil, a coil framework, a spring support, a spring plate and a load spring. The torque motor in the application adopts a single-coil structure and the axis of the exciting coil coincides with the rotating axis of the armature, and the coil is placed between the upper and lower armatures, so that the structure is simple and compact and the miniaturization of the torque motor is easy to realize. The torque motor in the application has two upper and lower armatures, and the two upper and lower armatures have four armature arms, so that eight air gaps can be formed. The eight air gaps are paired, and under the excitation of the control coil, four pairs of parallel magnetic circuits are formed; under the same power consumption and size, the torque motor with two pairs of parallel magnetic circuits has greater output torque, so that the same output torque can be realized with lower power consumption and smaller size.

The application discloses a kind of cylinder air pressure control devices, including gas path component and cylinder, at least one group of high-pressure gas path component and at least one group of low-pressure gas path component are provided with at least one cylinder connection controlled, the high-pressure gas path component is equipped with high-pressure solenoid valve and high-pressure electric proportional valve, the low-pressure gas path component is equipped with low-pressure solenoid valve and low-pressure electric proportional valve;So as to improve the pressure accuracy of cylinder, shorten running time, improve equipment action efficiency, overall improve product quality and processing efficiency.

This application relates to a redundant hydraulic braking system and control method for vehicles. The integrated parking and service brakes are located at the wheel ends and have parking brake chambers and service brake chambers. The hydraulic oil supply unit includes an oil tank, a motor pump, and an accumulator. The parking brake unit includes a handbrake solenoid valve, and the service brake unit includes a brake pedal, an angular displacement sensor, a pedal valve, an electro-hydraulic proportional valve, and a shuttle valve. The angular displacement sensor is used to collect the brake pedal travel signal. The controller is electrically connected to the angular displacement sensor and each electro-hydraulic proportional valve, and is used to control the output pressure of the electro-hydraulic proportional valve based on the brake pedal travel signal or an external braking signal. The mechanical pedal circuit and the electronically controlled proportional valve circuit are completely independent; even if one circuit fails, normal braking can still be performed, meeting the stringent safety requirements of special vehicles. The short-stroke braking system uses pure electronic control, eliminating the initial free travel of the mechanical pedal, eliminating mechanical dead zones, and is compatible with both manned and unmanned modes. One system simultaneously supports driver pedal operation and remote drive-by-wire commands.

The invention provides a torpedo tank car braking system and a torpedo tank car. The torpedo tank car braking system comprises an air compressor, a pressure storage tank, a parking air path and a braking air path. The parking air path comprises a parking manual valve and a parking electromagnetic valve; the braking air path comprises an emergency electromagnetic valve, a proportional valve, a reversing valve and an operating valve. The torpedo tank car comprises a driven walking mechanism, a driven end shaft seat, a tank body, a driving end shaft seat, a driving walking mechanism and a machine room. The two ends of the tank body are connected with the driven end shaft seat and the driving end shaft seat respectively and arranged on the driven walking mechanism and the driving walking mechanism through center plates respectively, and the mechanical room is arranged on the driving walking mechanism. According to the torpedo tank car braking system and the torpedo tank car, autonomous control and autonomous air supply are completely achieved, the problems that a locomotive head traction type torpedo tank car is high in cost and low in efficiency are solved, and the problem that an underframe and a braking system of an autonomous advancing type torpedo tank car are not suitable is solved.

The application discloses a hydrogen internal combustion engine nitrogen oxide emission device and a vehicle, and relates to the technical field of vehicle engines, and in particular to a hydrogen internal combustion engine nitrogen oxide emission device and a vehicle. The device comprises a tail gas heating vaporization circuit, a cooling water heating vaporization circuit, a tail gas treatment circuit and a post-treatment controller. The tail gas heating vaporization circuit comprises a hydrogen internal combustion engine, a first vaporizer and a hydrogen distribution proportional valve. The post-treatment controller is electrically connected with an electric control unit of the hydrogen internal combustion engine, and the post-treatment controller is electrically connected with the hydrogen distribution proportional valve. The tail gas output port of the hydrogen internal combustion engine is communicated with the input end of the tail gas treatment circuit through the first vaporizer. The input end of the hydrogen distribution proportional valve is externally connected with a liquid hydrogen tank. The first output end of the hydrogen distribution proportional valve is communicated with the liquid hydrogen input port of the first vaporizer. The hydrogen gas output port of the first vaporizer is communicated with the hydrogen gas input port of the hydrogen internal combustion engine. The second output end of the hydrogen distribution proportional valve is communicated with the liquid hydrogen input port of the cooling water heating vaporization circuit. The device effectively improves the economy of the vehicle engine.

To provide a lift device which does not damage a substrate when the substrate is dechucked from a support.SOLUTION: In the servo control system, the lift pin assembly 300 includes lift pins 321 to move the substrate between the support and the transfer plane, at least one pneumatic actuator 317 including a moving member 318 to provide a load to the lift pins, at least one proportional pneumatic valve 301 to control a flow rate of fluid between the at least one pneumatic actuator and a pressurized fluid supply or between the at least one pneumatic actuator and a vent, a plurality of pressure sensors 313 to individually measure a pressure in respective supply lines to the at least one pneumatic actuator, and at least one position sensor 320 for measuring the position of the moving member 314.SELECTED DRAWING: Figure 3