A three-dimensional decoupling scanning probe

Abstract

The invention relates to the technical field of precision measuring instruments and particularly relates to a three-dimensional decoupling type scanning probe. The three-dimensional decoupling scanning probe comprises an X and Y direction measuring mechanism, a Z direction measuring mechanism, a probe housing, a measuring rod and a spring balancing mechanism. According to the probe, X direction, Ydirection and Z direction moving guide rails are formed through three sets of mutually perpendicularly installed diaphragm guiding mechanisms, an inductive sensor is installed in each of the three directions to measure the micro-displacement of a test needle in the three directions of X, Y, and Z. According to the probe of the invention, the mutual decoupling is performed in three directions, theprobe has the advantages of compact structure, small volume, high measurement precision, high sensitivity and good long-term stability, and one-dimensional, two-dimensional and three-dimensional scanning measurement can be realized.

Description

technical field [0001] The invention relates to the technical field of precision measuring instruments, in particular to a three-dimensional decoupling scanning probe. Background technique [0002] The three-dimensional probe is an important component in precision measuring instruments, especially in coordinate measuring machines. With the rapid development of measurement technology, the precision requirements for 3D probes are getting higher and higher. At present, the three-dimensional probes used on coordinate measuring machines at home and abroad mainly include series type, parallel type and series-parallel composite type; [0003] The tandem probe (such as the patent U.S. Pat No. 4660296 applied by Mauser-Werke Oberndorf GmbH in Germany and the patent U.S. Pat No. 5353510 applied by Ulbrich et al. in Belgium) is relatively simple in structure, but there is coupling between each measurement direction, which cannot be measured during measurement. Avoid mechanical coupli...

AI Technical Summary

Problems solved by technology

[0004] Parallel probes (such as the patent U.S.PatNo.5029398 applied by German Fritz Ertl et al.) are decoupled from each other in each measurement direction, but the structure is complex and difficult to process and assemble;

[0005] The series-parallel composite probe (such as the patent U.S. Pat No. 6131300 applied by Klingelnberg, Germany) has a relatively simple structure, but it is an incompletely decoupled probe, and there are still coupling errors

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