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Gas preparation equipment

A gas preparation and equipment technology, applied in the field of gas preparation equipment, can solve problems such as flange sealing and reliability deterioration, safety accidents, and environmental pollution, so as to improve the sealing effect, avoid leakage, and avoid safety accidents and environmental pollution Effect

Pending Publication Date: 2019-03-19
SHANGHAI ZHENGFAN TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, as the size of the flange increases, the airtightness and reliability of the flange will deteriorate under the conditions of high temperature, high pressure and high vacuum for the electronic special gas preparation equipment. There will be leakage of electronic special gas, causing safety accidents or polluting the environment

Method used

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Embodiment Construction

[0030] In order to make the technical problems solved by the present invention, the technical solutions adopted and the technical effects achieved clearer, the technical solutions of the embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings. Obviously, the described embodiments are only the technical solutions of the present invention. Some, but not all, embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative efforts fall within the protection scope of the present invention.

[0031] figure 1 It is a schematic structural diagram of the gas preparation equipment provided in this embodiment. like figure 1 As shown, the gas preparation device provided in this embodiment includes a container 300 , a flange sealing assembly 200 and a reinforced sealing assembly 100 . Wherein, the gas preparation equipment can be sealed and con...

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PUM

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Abstract

The invention relates to the technical field of semiconductors and in particular relates to gas preparation equipment. The gas preparation equipment provided by the invention comprises a container, aflange seal component and a sealing cover. The container comprises an upper seal head and a cylinder and is in sealed connection by virtue of the flange seal component. The sealing cover and the outerwall of the container form a sealed space, so that the flange seal component is sealed, and the sealing effect of the gas preparation equipment is improved. When the gas preparation equipment is usedunder a positive pressure, even if flange seal fails, electronic gas leakage can be effectively avoided, so that accidents and environmental pollution are avoided.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to a gas preparation device. Background technique [0002] With the continuous development of science and technology, electronic special gas, as a basic supporting source material, is more and more widely used in high-tech industries such as semiconductors, microelectronics and solar cells, and the scale of preparation and purification of electronic special gas is also increasing. . Electronic special gas is usually flammable, highly toxic and corrosive, which poses certain safety hazards to operators. In the electronics industry, the purity of electronic special gas is usually required to reach more than 99.9999%. [0003] The traditional electronic special gas preparation equipment includes an upper head, a cylinder and a flange sealing assembly, wherein the upper head and the cylinder are sealed by a flange sealing assembly, and the flange sealing assembly usually include...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01J7/00
CPCB01J7/00
Inventor 李东升
Owner SHANGHAI ZHENGFAN TECH