TFT substrate and scanned antenna having TFT substrate
一种扫描天线、基板的技术,应用在扫描天线领域,能够解决成本上升、相控阵列天线价格高等问题,达到成本降低的效果
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no. 1 approach
[0095] First, refer to figure 1 and figure 2 . figure 1 As described in detail, it is a schematic partial cross-sectional view near the center of the scanning antenna 1000A, figure 2 (a) and (b) are schematic plan views showing the TFT substrate 101A and the slot substrate 201 included in the scan antenna 1000A, respectively.
[0096] The scanning antenna 1000A has a plurality of antenna units U arranged two-dimensionally. In the scanning antenna 1000A, for example, the plurality of antenna units are arranged concentrically. In the following description, the region of the TFT substrate 101A and the region of the slot substrate 201 corresponding to the antenna unit U are referred to as “antenna unit region”, and the same reference numeral U as that of the antenna unit is assigned. Additionally, if figure 2 As shown in (a) and (b), in the TFT substrate 101A and the slot substrate 201, an area defined by a plurality of antenna element areas arranged two-dimensionally is ca...
no. 2 approach
[0330] In the previous embodiments, the upper surface of the planarization layer is lower than the upper surface of the patch electrode or the upper surface of the planarization layer is at the same height as the upper surface of the patch electrode. In this embodiment, the upper surface of the planarization layer is higher than the upper surface of the patch electrode.
[0331] refer to Figure 17 ~ Figure 20 Next, the scanning antenna 1000B of this embodiment and the TFT substrate 101B included in the scanning antenna 1000B will be described. Common reference numerals are assigned to components common to the previous embodiments, and explanations thereof are omitted.
[0332]
[0333] refer to Figure 17 (a), (b) and Figure 18 Next, the configuration of the antenna unit region U in the transmission / reception region R1 of the scanning antenna 1000A according to the present embodiment will be described.
[0334] Figure 17 (a) is a schematic plan view of the antenna un...
no. 3 approach
[0361] This embodiment is characterized in that the side taper angle of the opening of the planarization layer is small.
[0362] refer to Figure 25 ~ Figure 27 Next, the scan antenna 1000C of the present embodiment and the TFT substrate 101C included in the scan antenna 1000C will be described. Common reference numerals are assigned to components common to the previous embodiments, and explanations thereof are omitted.
[0363]
[0364] refer to Figure 25 (a), (b) of and Figure 26 Next, the configuration of the antenna unit region U in the transmission / reception region R1 of the scanning antenna 1000A according to the present embodiment will be described.
[0365] Figure 25 (a) is a schematic plan view of the antenna unit area U of the transmission / reception area R1 of the scan antenna 1000C. Figure 25 (b) is a schematic cross-sectional view of the TFT substrate 101C included in the scanning antenna 1000C along the Figure 25 A schematic cross-sectional view of t...
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