All-day imaging detector with multifunctional window and preparation method thereof

Abstract

The invention relates to an all-time imaging detector with a multifunctional window and a preparation method thereof. The device includes a multifunctional window and a detection part, and the multifunctional window includes a microlens array, a window body and an optical filter array; the microlens The array is integrated on the upper surface of the window body, and the top surface of each microlens unit is a spherical cap structure, and the top view projection of the spherical cap is a square, and the squares of the spherical cap top view projections of adjacent microlens units are connected; the filter array It is plated on the lower surface of the window body; the filter array includes four kinds of filters, which are respectively three kinds of monochromatic visible light combined with an infrared band-pass filter and an infrared filter; the detection part It is composed of an array of pixel units, each pixel unit includes four sub-pixel units, and the four sub-pixel units are directly opposite to four kinds of filters; the invention also introduces the preparation method of the microlens array and the detection method of the detector . The device of the invention can realize all-day detection.

Description

technical field

[0001] The invention belongs to the technical field of photoelectric detection, and in particular relates to an all-time imaging detector with a multifunctional window and a preparation method thereof. Background technique

[0002] Photodetectors are detected by changes in the conductivity of the irradiated material caused by radiation. Photodetectors have a wide range of uses. They are mainly used in imaging and detection, industrial automatic control, photometry, etc. in the visible or near-infrared band; in the infrared band, they are mainly used in infrared thermal imaging, infrared remote sensing, etc.

[0003] Traditional photodetectors are composed of discrete windows, microlens arrays, filter arrays and pixel unit arrays, which need to be assembled separately to form detectors. The window is designed for the detector to penetrate the light wave and isolate the air for vacuum packaging. The microlens array below the window can pass through the detect...

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