A contact type linear stress sensor and its stress detection method

Abstract

The invention relates to a contact type linear stress sensor based on an arrayed waveguide grating structure and a stress detection method thereof, comprising an input channel, an input slab waveguide, an arrayed waveguide grating composed of a specific number of single-mode waveguides, an output slab waveguide, and an output channel; For the waveguide grating, the rectangular area to which the specific single-mode waveguide that constitutes it belongs is used as the refractive index sensitive area, that is, the stress contact detection area. The contact type linear stress sensor of the present invention cleverly utilizes the wavelength-sensitive demultiplexing characteristic of the arrayed waveguide grating (AWG), that is, the change of the effective refractive index of the core layer of the waveguide brings about the change of the phase difference of light of different wavelengths in the adjacent waveguide. After the channel waveguide is output, the effective refractive index of different waveguide core layers corresponds to different central wavelengths, realizing the stress detection function of the device.

Description

technical field [0001] The invention relates to a contact type linear stress sensor based on an arrayed waveguide grating structure and a stress detection method thereof, belonging to the technical field of stress detection. Background technique [0002] With the advancement and development of science and technology, the application of sensing technology is becoming more and more common. As a way of collecting information, it is widely used in various fields, and has now become an important symbol to measure the development level of a country's science and technology. Among them, the stress sensor, as the most commonly used sensor, is widely used in various industrial self-control environments, involving water conservancy and hydropower, railway transportation, intelligent buildings, production self-control, aerospace, military industry, petrochemical, oil wells, electric power, ships, machine tools, pipelines, oceans, etc. industries and fields. [0003] At present, in the...

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Problems solved by technology

[0003] At present, in the military field, such as the control and monitoring of stress in aerospace equipment, aircraft and other fields, the marine field and health status monitoring and other fields, higher requirements are placed on the performance of stress sensors, especially in order to meet social needs. The requirements for accuracy, sensitivity, and stability are getting higher and higher. At present, the sensors used to measure stress include fiber grating stress sensors, silicon-based optical MEMS pressure sensors, capacitive stress sensors, and resonant stress sensors. The optical sensor in the sensor is easily affected by the change of the light source. For example, the measurement results of the commonly used Mach-Zehnder (M-Z) interferometric optical pressure sensor are greatly affected by the attenuation of the light source, wavelength drift, etc.; the silicon-based optical MEMS pressure sensor mainly passes the output light intensity. The change of the pressure is used to detect the size of the pressure, but the relationship between the pressure and the light intensity is nonlinear, so the sensor is nonlinear

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