Contact type linear stress sensor based on mini-ring structure and stress detection method thereof

Abstract

The invention relates to a contact type linear stress sensor based on a mini-ring structure and a stress detection method thereof. The contact type linear stress sensor comprises a broadband light source, a mini-ring resonant cavity and a spectrum analyzer which are sequentially connected, wherein the mini-ring resonant cavity sequentially comprises a substrate, a lower limiting layer, a channel straight waveguide, a mini-ring waveguide and an upper limiting layer from bottom to top; the area where the channel straight waveguide and the mini-ring waveguide are located is a refractive-index sensitive area; after signal light is input from a left port of the channel straight waveguide, coupling occurs when the signal light is close to the mini-ring resonant cavity, part of light power inputfrom a channel is continuously coupled to enter the mini-ring resonant cavity, and meanwhile, part of light power in the mini-ring resonant cavity is also continuously coupled to enter the channel straight waveguide and then is output from a right port of the channel straight waveguide. The sensitive wave splitting character of the mini-ring waveguide to wavelengths is ingeniously utilized, afteroutput from the right end of the channel straight waveguide, different effective refractive indexes of a mini-ring waveguide core layer correspond to different central wavelengths, and thus the stressdetection function of the device is achieved.

Description

technical field [0001] The invention relates to a contact type linear stress sensor based on a microring structure and a stress detection method thereof, belonging to the technical field of stress detection. Background technique [0002] As an important means of obtaining information, sensing technology is widely used in various fields such as life and production, and has now become an important symbol to measure the development level of a country's science and technology. Among them, the stress sensor, as the most commonly used sensor, is widely used in various industrial self-control environments, involving water conservancy and hydropower, railway transportation, intelligent buildings, production self-control, aerospace, military industry, petrochemical, oil wells, electric power, ships, machine tools, pipelines, oceans, etc. industries and fields. [0003] At present, in the military field, such as the control and monitoring of stress in aerospace equipment, aircraft an...

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Problems solved by technology

[0003] At present, in the military field, such as the control and monitoring of stress in aerospace equipment, aircraft and other fields, the marine field and health status monitoring and other fields, higher requirements are placed on the performance of stress sensors, especially in order to meet social needs. , sensitivity, stability and other requirements are getting higher and higher. At present, the sensors used to measure stress include fiber grating stress sensors, capacitive stress sensors, resonant stress sensors, etc. The optical sensors in the prior art are susceptible to changes in light sources. For example, the measurement results of commonly used Mach-Zehnder (M-Z) interferometric optical pressure sensors are greatly affected by light source attenuation, wavelength drift, etc.; silicon-based optical MEMS pressure sensors mainly detect the pressure through changes in output light intensity, but There is a nonlinear relationship between pressure and light intensity, so the sensor is nonlinear

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