A transfer mechanism and testing equipment

Abstract

The embodiment of the present invention discloses a transfer mechanism and a detection device. The transfer mechanism includes a machine table, a first carrier table and a second carrier table which are arranged on the machine table and are oppositely arranged, and a first carrier table that drives the first carrier table. a driving unit for driving the second driving unit of the second stage, the first sensing assembly, and the second sensing assembly; the controller, the controller is respectively connected with the first driving unit, the first sensing assembly and the second driving unit It is electrically connected to the second sensing component, and the controller is used to control the synchronous movement of the first driving unit and the second driving unit to drive the first carrier and the second carrier to perform synchronous movement, and also acquire the first The first sensing signal of the carrier is used to adjust the position of the first carrier, and the second sensing signal of the second carrier collected by the second sensing component is acquired and the position of the second carrier is adjusted. The embodiment of the present invention reduces the accumulated error caused by long-term movement, and improves the accuracy of the moving position.

Description

technical field [0001] Embodiments of the present invention relate to motor technology, and in particular, to a transfer mechanism and detection equipment. Background technique [0002] During the manufacturing process of the display panel, the occurrence of display defects is unavoidable. Poor display is related to materials and processes. Materials such as luminescent materials, array layers, metal electrode layers (gate, source and drain), insulating layers and sealants appear in any step in the process of making the above material layers. Defects can produce poor display. Based on this, the current display panel manufacturing process also includes a panel inspection process, which can prevent defective display panels from entering the market. [0003] In the existing panel surface defect inspection equipment, a dual-axis transfer motor is used to drive the movement of the stage, which in turn drives the substrate to be tested. Move the target position. SUMMARY OF TH...

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Problems solved by technology

[0003] The existing panel surface defect detection equipment uses a dual-axis transfer motor to drive the movement of the stage, and then drives the substrate to be inspected to move. However, after a long-term movement of the dual-axis transfer motor, cumulative errors may occur, resulting in deviations in the actual moving position. move target position

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