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Production process of clean tubes for semiconductors

A production process and semiconductor technology, which is applied to the production process of clean tubes for semiconductors, can solve problems such as limitation, and achieve the effects of accurate process flow, increased proportion and reasonable design.

Inactive Publication Date: 2019-09-27
ZHEJIANG ZHONGDA SPECIAL STEEL
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] Seamless steel pipe is a long strip of steel with a hollow section and no seams around it. The seamless steel pipe has a hollow section and can be used as a pipeline for transporting fluids, such as pipelines for transporting oil, natural gas, gas, water and certain solid materials etc. Stainless steel pipes with high cleanliness are often used in semiconductor preparation equipment, but domestic manufacturers that can produce clean pipes for semiconductors are very limited and can only rely on foreign imports. Therefore, it is necessary to propose a production process for clean pipes for semiconductors

Method used

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Examples

Experimental program
Comparison scheme
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Embodiment Construction

[0018] In order to make the object, technical solution and advantages of the present invention more clear, the present invention will be further described in detail through the following examples. However, it should be understood that the specific embodiments described here are only used to explain the present invention, and are not intended to limit the scope of the present invention. Also, in the following description, descriptions of well-known structures and techniques are omitted to avoid unnecessarily obscuring the concept of the present invention.

[0019] A kind of production technology of clean tube for semiconductor of the present invention comprises the following steps:

[0020] A) select a specific tube blank, and perform component analysis on the tube blank;

[0021] B) Through finishing rolling, drawing of oil-lubricated floating mandrel, solid solution bright heat treatment, deep cleaning of inner and outer surfaces

[0022] Process the pipe blank by other pro...

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PUM

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Abstract

The invention discloses a production process of clean tubes for semiconductors. The production process includes the following steps that specific tube raw materials are selected, and the tube raw materials are subjected to component analysis; the tube raw materials are machined according to the requirements of clients, and tubes with corresponding sizes are obtained; the tubes are subjected to electrochemical polishing and semiconductor class clean treatment; the tubes obtained after clean treatment are subjected to performance inspection; and the tubes passing through inspection are packaged and delivered out of a factory. Compared with the prior art, the production process is reasonable in design and simple in process, the clean tubes, meeting the standards, for the semiconductors can be produced, and the occupation quota of the clean tubes for the domestic semiconductors on the domestic market is increased.

Description

【Technical field】 [0001] The invention relates to the technical field of stainless steel pipes, in particular to a production process of clean pipes for semiconductors. 【Background technique】 [0002] Seamless steel pipe is a long strip of steel with a hollow section and no seams around it. The seamless steel pipe has a hollow section and can be used as a pipeline for transporting fluids, such as pipelines for transporting oil, natural gas, gas, water and certain solid materials etc. Stainless steel pipes with high cleanliness are often used in semiconductor preparation equipment, but domestic manufacturers that can produce clean pipes for semiconductors are very limited and can only rely on foreign imports. Therefore, it is necessary to propose a production process for clean pipes for semiconductors. 【Content of invention】 [0003] The purpose of the present invention is to solve the problems in the prior art, and propose a production process of clean pipes for semiconduc...

Claims

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Application Information

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IPC IPC(8): B21C37/06B08B9/027C22C38/58C22C38/44C22C38/04C22C38/02
CPCB08B9/027B21C37/06C22C38/002C22C38/02C22C38/04C22C38/44C22C38/58
Inventor 吴月琴徐姚松徐俞生李文豪
Owner ZHEJIANG ZHONGDA SPECIAL STEEL