MEMS static closed-loop spectral imaging system

Abstract

The invention discloses an MEMS static closed-loop spectral imaging system and relates to the field of spectral imaging technologies. According to the spectral imaging system, a broadband light sourceand an MEMS micro-mirror array are combined in use, so that the wavelength of system output light is arbitrarily adjustable, an adjustable light source output by the system performs optical fiber beam lighting through optical fiber beam coupling, and large-area high-speed imaging of a to-be-detected sample can be realized in cooperation with an array detector; moreover, three-dimensional spectralimaging can be realized under the static condition of the system, and it is not needed to externally introduce a complicated mobile component for push-scan imaging; by adding the spectral imaging system, the whole system forms a closed-loop wavelength calibration structure, the stability of the system output wavelength can be guaranteed at any moment, image information collected by the system ismore accurate and stable, and environment interference resistance is stronger; and by introducing the optical fiber beam lighting mode into the system for lighting, a slit-coupled line light source can be converted into an area-array light source, large-area illumination can be realized, uniform illumination also can be realized, and therefore imaging quality can be further improved.

Description

technical field [0001] The invention relates to the technical field of spectral imaging, in particular to a MEMS type static closed-loop spectral imaging system. Background technique [0002] In recent years, spectral imaging system has become a hot spot in application research in various industries. Traditional spectral imaging is mostly designed by two-dimensional array detectors and push-broom methods. Not only is the system bulky, but it also requires high-precision scanning mechanisms to achieve precise positioning of wavelengths, and the structure is complex. The cost is high, the shock resistance is poor, and the influence of wavelength drift on the measurement results under different temperature conditions cannot be guaranteed. [0003] In order to overcome some problems of traditional motor scanning, MEMS (Micro-Electro-Mechanical Systems) technology realizes the design of micro-optical mirrors, especially the MEMS micro-mirror array represented by American TI compa...

AI Technical Summary

Problems solved by technology

Among them, DMD is mainly used to compress images, which solves the problem of large data transmission difficulties in image processing, but because compressed images will cause information loss, which directly affects the quality of spectral imaging, and the grating in the system uses a scanning method, which cannot guarantee the stability of the system wavelength.

In addition, the patent CN 107655569 A discloses a hyperspectral camera, a hyperspectral imaging device and a control method. DMD is used for wavelength selection after splitting, and a linear array detector is used for imaging. The system is affected by slit imaging without push-broom The area is limited, the amount of information is small, and the application scenarios are limited

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