110 results about "Wavelength calibration" patented technology

The invention relates to the technical field of water quality detection, and discloses a water quality pollutant detection method, system and equipment based on spectral analysis, and the method comprises the following steps: carrying out real-time spectral data acquisition on a water body sample in a vehicle driving process through a multispectral sensor array in a vehicle-mounted water quality detection device; obtaining a water body spectrum three-dimensional data cube; carrying out anti-vibration wavelength calibration and ambient light source interference elimination processing to obtain a preprocessed spectrum data set; performing standard multivariate decomposition processing and horizontal local constraint optimization of a pollutant target wave band on the preprocessed spectrum data set to obtain enhanced feature fingerprint spectrums for different types of water quality pollutants; and inputting the enhanced feature fingerprint spectrum into a deep belief network model to perform pollutant feature matching analysis to obtain various pollutant types and corresponding concentration values in the water body sample, thereby effectively eliminating ambient light changes and other background interferences, not only determining the pollutant types, but also accurately quantifying the concentration values.

The invention provides a method and a system for detecting gas concentration in an epitaxial growth reaction cavity, computer equipment and a storage medium. The method comprises the following steps: acquiring a reflected light signal, a reference signal and a reaction cavity environment signal; carrying out wavelength calibration and intensity baseline calibration on the reflected light signal according to the reference signal, and generating an experimental absorption spectral line according to the calibrated reflected light signal; according to the reaction cavity environment signal, fitting the experimental absorption spectral line and a target absorption spectral line obtained by querying a preset database, and performing inversion to obtain concentration information of the gas to be detected. According to the invention, through double calibration of a reference channel, an experimental spectral line and a database target spectrum are strictly aligned on a frequency scale and an amplitude scale, interference of linear displacement and baseline fluctuation on fitting is reduced, and quantitative precision is improved; and meanwhile, an environmental condition is introduced as a physical constraint, so that parameter coupling is weakened, the identifiability and robustness of inversion are improved, the dependence on pure empirical correction is reduced, and the stability of detection data is improved.

The invention provides a spectrograph wavelength calibration method, device and equipment and a medium, and the method comprises the steps: obtaining the spectral data of a spectrograph at different temperatures, and obtaining the spectral data of the spectrograph at different temperatures according to the pixel positions of a characteristic wavelength point at different temperatures and the pixel position of the characteristic wavelength point at a preset reference temperature; determining the pixel position offset of the characteristic wavelength point at different temperatures, and calibrating the wavelength of the spectrograph according to the pixel position offset of the characteristic wavelength point at different temperatures; in the process of calibrating the wavelength of the spectrograph, the wavelength drift caused by the pixel position offset of the characteristic wavelength point at different temperatures is fully considered, the output error of the wavelength of the spectrograph is reduced, and the wavelength output accuracy of the spectrograph is improved.

The invention relates to the technical field of spectrum baseline correction, and provides a spectrograph baseline correction method and system based on improved empirical mode decomposition, and the method comprises the following steps: employing a sliding window smoothing method, and carrying out the preprocessing of obtained measurement spectrum data; an improved empirical mode decomposition algorithm is adopted, fitting is carried out on the preprocessed measurement spectrum data to obtain baseline data, and the improved empirical mode decomposition algorithm adopts least square fitting to construct upper and lower boundary envelopes of the spectrum data; subtracting the baseline data obtained by fitting from the obtained measurement spectrum data to obtain the measurement spectrum data after the baseline is removed; and sequentially carrying out abnormal point detection and removal, spectral power calibration and wavelength calibration on the measured spectral data after baseline removal to obtain spectral data after baseline correction. The spectral baseline is identified by improving empirical mode decomposition, the stability and boundary adaptability of mode decomposition are enhanced, and a more accurate baseline fitting result is obtained.

The invention discloses a fiber optic spectrometer for film thickness measurement. The fiber optic spectrometer comprises a control and data processing module, a detection module, a light source module and a light splitting module, the optical fiber coupling module couples wide-spectrum light of the light source module and then guides the light to the light splitting module; the light splitting module adopts a cross-type Czerny-Turner light path structure, and performs collimation, dispersion and focusing processing on light beams in sequence; the detection module is used for receiving the optical signal processed by the light splitting module and forming an interference pattern; and the control and data processing module is used for driving acquisition, completing pixel-wavelength calibration and calculating the film thickness based on an acquired interference pattern. According to the optical fiber spectrometer measurement method for film thickness measurement, the problem of low accuracy of real-time film thickness detection in the prior art is solved.

The invention provides a device and method for calibrating the wavelength of a spectrometer, and belongs to the technical field of optics, and the device comprises a light source module which is used for outputting wide-spectrum continuous light; the collimation module is used for outputting collimated light based on the wide-spectrum continuous light; the polarizer is used for generating linearly polarized light based on the collimated light; the rotating platform is used for placing a wave plate; the polarization analyzer is located in the light beam output direction of the wave plate; the focusing module is used for converging the light beams output by the polarization analyzer to the spectrograph; the spectrograph is used for detecting the energy of the input light beam so as to output corresponding optical data; the optical data comprises pixels and light intensity data of the input light beam; and a processor for determining a ratio of maximum response discrete light intensity data to minimum response discrete light intensity data based on the optical data, determining a peak center pixel position based on the ratio, and calibrating the spectrometer wavelength based on the pixel position. According to the invention, the technical problem of low accuracy of the wavelength calibration result of the existing spectrograph wavelength calibration method can be solved.

The invention belongs to the technical field of biomedical detection, and discloses a Raman spectrum analysis device for quantitative detection of hematologic tumor markers, which comprises a blood collection centrifugal unit with a self-adaptive load regulation mechanism for monitoring blood density and components in real time, centrifugal force and time parameters are automatically adjusted according to the blood density and components; the optical fiber Raman spectrometer is provided with an automatic wavelength calibration system, and an ultrafast laser pulse transmitter and a high-sensitivity photon counting detector are integrated on the optical fiber Raman spectrometer. Raman scattering signals are enhanced by adopting a quantum entanglement light source and a nonlinear optical crystal; according to the invention, the detection capability on low-concentration tumor markers can be obviously improved. Due to the improvement, the device can accurately detect the existence of the tumor marker at the early stage of cancer, and powerful support is provided for early treatment of a patient.

The invention relates to the technical field of spectrum calibration, in particular to a spectrograph wavelength calibration method and device, and the method comprises the steps: obtaining the calibration data of a spectrograph based on the grating rotation of the spectrograph and a preset detector; performing virtual center solving on a global virtual pixel array corresponding to a preset detector in the calibration data to obtain an incident angle and a virtual pixel center position corresponding to the calibration data; constructing a global physical model based on the calibration data, the incident angle and the virtual pixel center position; constructing a physical constraint spline model based on the global physical model; converting the calibration data into a predicted incident angle based on a physical constraint spline model; and determining a target wavelength corresponding to the calibration data based on the physical model and the predicted incident angle. According to the method, a joint optimization mechanism of optical parameters and a mathematical model is established, high-precision calibration of the spectrograph can be achieved only through a small number of calibration points on the premise that the physical authenticity of the optical law is guaranteed, and the spectrum calibration stability is improved.

The invention relates to the technical field of measurement, in particular to an automatic calibration device and method for a spectrograph. Comprising a light source, an optical isolator, an optical fiber coupler, a standard reference light source, an adjustable optical fiber attenuator, a first optical fiber collimator, a holographic frequency selection module, an electric reflector, a volume holographic grating, a second optical fiber collimator, a beam splitter, an optical interface unit, a spectrometer to be tested, a photoelectric detector, an electric reflector driver, an arc second level angle encoder, a control module and a communication module. A computer and an image display unit. The volume holographic grating is used for selecting a specific wavelength to measure the corresponding relation between the spectrograph pixel and the wavelength, monochromatic light can be continuously selected, and the theoretical resolution is consistent with the spectral resolution of the light source; automatic calibration of the spectrometer is realized by using an automatic calibration method, pixel-wavelength calibration data can be automatically generated and stored in a preset format, automatic calibration and data processing of spectral measurement software are facilitated, and pixel-level wavelength-pixel position registration is realized.

The invention provides a wavelength calibration method, a calibration sample, and a program product. The wavelength calibration method is a wavelength calibration method for a multicolor spectrometer provided with a diffraction grating and a detector at which light dispersed by the diffraction grating is imaged. The wavelength calibration method includes the steps of: providing light containing a known clear spectrum to a multicolor spectrometer, and acquiring a first measurement result output from a detector; a second measurement unit that supplies reflected light or transmitted light to the multicolor spectrometer, said reflected light or transmitted light being generated by irradiating a calibration sample having a gap provided therein with light, and acquires a second measurement result output from the detector; determining a wavelength table such that the position of the known clear spectrum in the first measurement result matches the wavelength of the known clear spectrum; and repeating the update of the wavelength table so as to minimize an error calculated on the basis of the second measurement result and the wavelength table.

A method for calibrating the driving parameters of an optical component within its operating wavelength range. The method includes placing a material layer in an optical path, the material layer being substantially planar and substantially transparent, and having a thickness on the order of wavelengths within the range; operating the component to change the driving parameters while detecting light transmitted through the material layer to obtain driving parameter and light intensity data. The obtained data is then compared with previously derived characterization data for the material layer to calibrate the driving parameters.

A concurrently measuring multiple light input spectrometer with a shared or common optical path is described. The spectrometer can help eliminates errors from dark offsets, can reduce impact of ambient optical and electrical noise, and can mitigate temperature effects. Additionally, it can help readily provide wavelength calibration. By using just two inputs, spectrometer can provide true spectral measurement of the test object by continuous measurement of the spectra of the source and the spectra of the source light after interacting with the test object. More generally, including an individual photodetector (instead of an array of multiple photodetectors) associated with each input can help address solving the problems that may get introduced by using multiple photodetectors for a particular input.

The present application relates to the technical field of measurement, in particular to a kind of spectrometer automatic calibration device and method, comprising: light source, optical isolator, fiber coupler, standard reference light source, adjustable fiber attenuator, first fiber collimator, holographic frequency selection module, electric reflector, volume holographic grating, second fiber collimator, beam splitter, optical interface unit, to be measured spectrometer, photoelectric detector, electric reflector driver, angle-second level angle encoder, control module, communication module, computer and image display unit.The present application utilizes volume holographic grating to select the corresponding relationship between the pixel of spectrometer and wavelength, can continuously select monochromatic light, and the theoretical resolution is consistent with the spectral resolution of light source;Using automatic calibration method, the automatic calibration of spectrometer is realized, pixel-wavelength calibration data can be automatically generated and stored in preset format, which is convenient for automatic calibration and data processing of spectral measurement software, and realizes wavelength-pixel position registration at pixel level.

The utility model relates to a gas detection device which comprises a light-emitting part, a calibration gas chamber, a detection gas chamber, a photoelectric detection assembly and a wavelength calibration assembly capable of adjusting the wavelength of light emitted by the light-emitting part, and the photoelectric detection assembly comprises a first detection part capable of receiving the light emitted by the light-emitting part. The calibration gas chamber and the detection gas chamber are both located on a light path of light emitted by the light emitting part. The gas detection device provided by the utility model solves the problem that the existing gas detection equipment is relatively high in maintenance cost.

The invention relates to the field of optical measurement, in particular to a novel single spectral confocal sensor accurate thickness measurement calibration and evaluation method, which comprises the steps of spectral data preprocessing, spectral stability evaluation, algorithm error verification, displacement-wavelength calibration, emergent angle-wavelength calibration and the like. Normalization processing is carried out to eliminate noise by obtaining dark current noise signals and the like, spectrum flatness and stability are evaluated by using an optical filter in a specific area, accuracy and precision of an algorithm are calculated through an odd-even grouping method, and the invention further relates to a spectrum confocal thickness measurement system which stores a calibrated relation for real-time thickness calculation. The technical effects of eliminating light source modulation, dark noise and light path crosstalk noise, accurately evaluating spectrum stability, accurately verifying algorithm errors, realizing accurate calibration of displacement-wavelength and emergent angle-wavelength and further realizing accurate thickness measurement are achieved.

The application provides a wavelength calibration and measurement method based on a measuring device, comprising: obtaining full-waveband light intensity information of a sample to be measured, and processing to obtain a measured Fourier coefficient corresponding to each wavelength; fitting and iteratively obtaining a first system parameter corresponding to each wavelength, a sample thickness and an incident angle according to the measured Fourier coefficient and a theoretical Fourier coefficient of each wavelength; fitting and iteratively obtaining a global sample thickness and a global incident angle through a specific function; fixing the global sample thickness and the global incident angle, and fitting and iteratively obtaining a second system parameter corresponding to each wavelength again; and calculating a full-waveband spectral Mueller matrix of the sample to be measured according to the measured Fourier coefficient corresponding to each wavelength and the second system parameter. The application obtains parameters such as the global sample thickness and the global incident angle which do not change with the wavelength through an iterative fitting mode, and then calibrates other parameters, which is more accurate compared with the prior art of determining the global sample thickness and the global incident angle according to experience.

The invention relates to the technical field of hyperspectral remote sensing spectral analysis, in particular to a full-spectrum splicing high-resolution imaging system and method for a hyperspectral analyzer, and the method comprises the steps: determining a slit switching sequence through an acquisition module; the dynamic collimation module feeds back an aberration result; the adaptive dispersion module carries out wavelength calibration; the high-precision imaging module predicts imaging mirror parameters; the real-time compensation module adopts a Kalman filtering algorithm to predict the defocus compensation amount and executes nanoscale displacement compensation through a piezoelectric ceramic driver; the intelligent splicing module adopts an SIFT feature matching algorithm, a generative adversarial network and a reinforcement learning algorithm to realize image registration and fusion; the cooperative control module generates control signals through Monte Carlo simulation and a Bayesian optimization algorithm to coordinate all the modules. According to the invention, the problems of insufficient spectral resolution, difficulty in data splicing and low real-time measurement efficiency caused by fixed hardware parameters in a wide-spectrum spectral imaging system are solved, and full-spectrum high-resolution imaging is realized.

The invention discloses a low-energy-consumption wavelength and intensity composite standard lamp which structurally comprises a deep ultraviolet module, a visible-infrared module, a micro-channel heat dissipation structure and a rare earth sharp line calibration unit. The core innovation is that a rare earth sharp line calibration unit is integrated on the basis of a standard intensity lamp, that is, a cuvette filled with a Re (Er-Ho-Dy) (NO3) 3 or Re (Er-Ho-Dy) (ClO4) 3 ternary mixed solution is additionally arranged at a light source outlet. The device has the beneficial effects that the device can be switched to a sharp line mode on the basis of an intensity calibration function to realize high-precision wavelength calibration, is compact in integration, and adapts to a portable detection scene.

The invention discloses a spectrograph high-precision wavelength calibration method based on optical filter hardware interception, and the method comprises the steps: placing an optical filter in an interference light path, limiting the spectrum range in a hardware manner, and enabling a camera to directly collect an interference spectrum signal with a sharp boundary; extracting wave crest and wave trough positions of the interference spectrum signal, calculating a local half cycle and fitting to obtain a half cycle change curve; calculating a phase gradient to obtain a wavenumber gradient; solving a relative function of wave numbers through an integral accumulation mode; establishing a mapping relation between a pixel coordinate and a wavelength by combining cut-off wavelength information of the optical filter, and completing wavelength calibration of the spectrograph; performing interpolation resampling on the interference spectrum signal based on a calibration result; and Fourier transform is carried out on the re-sampled interference spectrum signal to obtain depth information. According to the invention, the problem that the existing calibration method depends on an expensive light source, and is insufficient in precision or high in complexity can be solved.

The application provides a PPG baseline calibration method for a wearable continuous blood pressure monitoring device, which comprises the following steps: decoupling the relationship between contact pressure and infrared PPG baseline; since pressure is a scalar, the contact pressure change of the measured position can be equivalent to the opposite change of the hydrostatic pressure inside the artery; collecting infrared PPG waveforms under different hydrostatic pressures through two different height postures to model the relationship between contact pressure and PPG waveform, MLP modeling and the setting of a dual-wavelength calibrator; without affecting the extraction of blood pressure related features; enabling the existing blood pressure monitoring algorithm to achieve the A-class standard of BHS in long-term continuous monitoring; the method can be directly deployed in the existing blood pressure monitoring system without modifying the original blood pressure algorithm or model structure; the problem that PPG baseline drift occurs due to long-term wearing of the wearable device and thus continuous and accurate blood pressure monitoring cannot be achieved is solved; and more accurate continuous blood pressure monitoring can be achieved.

The invention discloses an ultra-narrow band optical filter absolute frequency reference in-situ calibration device which comprises a hollow cathode lamp, the output end of the hollow cathode lamp is connected with one input end of a one-to-two optical fiber through a light beam coupling device, and the output end of a variable diaphragm is connected with the other input end of the one-to-two optical fiber through an optical fiber; light beams output by the one-to-two optical fiber are split, the first split beam is input to the second photoelectric detector, and the second split beam transmits the ultra-narrow band light filter and is detected by the first photoelectric detector; the invention further discloses an in-situ calibration method for the absolute frequency reference of the ultra-narrow band light filter, the center transmission wavelength of the etalon is calibrated through the absolute wavelength of the hollow cathode lamp, the etalon is accurately controlled at constant temperature and constant voltage, the center transmission wavelength of the etalon is calibrated, and the calibration of the center wavelength of the etalon is integrated with an external optical signal detection function; and through the automatic calibration process, the calibration efficiency is greatly improved, manual operation errors are avoided, and a high-precision calibration task can be completed in a short time.

The present application belongs to the technical field of powder material testing and analysis method, and discloses a testing method for testing the carrier separation efficiency of photocatalyst powder particles under fixed light excitation. The method uses silver nitrate, chloroplatinic acid and other reagents which are easily reduced by photo-generated electrons as hole sacrificial reagents to react with photo-generated electrons separated to the surface; uses methanol, formic acid, ethanol, triethanolamine, H2O2 and other small molecules which are easily oxidized by holes as electron sacrificial reagents to react with photo-generated holes separated to the surface; under a single-wavelength calibration light source, irradiation is carried out for a fixed length of time of photocatalytic reaction, the total amount of photo-generated electrons participating in the surface metal deposition reaction is quantitatively separated and determined by measuring the deposition amount of Ag or Pt particles deposited on the photocatalytic particles, and the charge separation efficiency value of the photocatalyst powder material is calculated by assuming that the noble metal ion deposition reaction efficiency is 100%.

The application discloses a double-optical-path spectrometer, a color measurement device and a calibration method, and relates to the field of color measurement devices. The color measurement device obtains reflected light of a measured sample and reflected light of a test light source, and inputs the reflected light into a first incident slit and a second incident slit of a spectrometer through a Y-shaped light path unit; the reflected light is incident on a grating through a lens; diffracted light spots returned by the grating are incident on a photosensitive surface of a sensor on the side of the incident slit through the lens; the photosensitive surface is provided with an aperture stop with a dislocation opening; and the photosensitive surface at each dislocation opening only receives light signals of one light path, so that the short-term repeatability of spectrophotometry is improved. When wavelength calibration is performed, light signals of a calibration light source are obtained through the Y-shaped light path unit; pixel position information of the collected light signals is obtained according to a sensor of the spectrometer; a fourth-order polynomial is used to fit wavelength data and the pixel position information; the correspondence between the pixels and the wavelengths is adjusted; and the wavelengths are calibrated, so that the short-term repeatability of spectrophotometry is improved.

The application provides a kind of management and control chemical fast LIBS classification identification model construction method, medium and system, belongs to management and control chemical technical field, the application is by collecting mercury argon reference lamp spectrum to carry out wavelength calibration, according to atomic spectrum database extraction management and control element characteristic transition wavelength window and compressed to low-dimensional feature space by sparse self-encoder, with hydrogen line starker broadening and Boltzmann graph slope method real-time inversion electron density and electron temperature and to compressed characteristic matrix is physically normalized, calculates plasma drift index to adaptively adjust plasma parameter decoupling double-flow condition graph network update strategy, the normalized characteristic matrix and physical diagnostic value are input into the artificial intelligence network to output element concentration vector and class prediction probability, solve the technical problems that plasma parameter fluctuation leads to laser-induced breakdown spectroscopy classification feature instability, classification accuracy significantly decreases under the condition of cross-instrument and cross-matrix.

This invention provides a traceable uncertainty assessment method for dynamic wavelength calibration. First, it performs uncertainty source analysis based on Taylor series expansion, determining that the time-frequency relationship calibration uncertainty is mainly determined by the uncertainty of the local continuous time-frequency relationship. Then, it assesses the impact of peak location on uncertainty, the uncertainty of the standard interferogram, and the uncertainty of interference intensity under complex tuning conditions, quantifying the standard interferogram uncertainty and the measurement uncertainty generated by local normalized frequency interpolation. These are then combined to obtain the combined uncertainty of the normalized time-frequency relationship. Finally, the combined uncertainty of the normalized time-frequency relationship is multiplied by the free spectral range of the F-P interferometer to obtain the absolute uncertainty of the time-frequency relationship calibration. This invention enables the quantification and propagation analysis of each error component during nonparametric point-by-point calibration, establishing a systematic uncertainty assessment framework and providing a scientific basis for the reliability of the calibration results.

The invention provides an automatic wavelength calibration method and device for a grating spectrometer, and belongs to the field of spectral analysis, and the method comprises the steps: collecting a spectrum of a selected atomic spectral line lamp, and obtaining a measurement spectrum containing a plurality of peak positions; all peak positions of the measurement spectrum are detected, a plurality of standard peak wavelengths in the standard spectrum of the atomic spectral line lamp are selected at the same time, then the measurement peak combination and the standard peak combination are subjected to proportion matching, and the measurement peak combination with the optimal proportion is screened out; carrying out expansion matching on the residual peak position of the measurement spectrum; and performing polynomial fitting on peaks of all matched spectral data, and calculating central wavelengths of all pixels to complete spectral calibration. The calibration efficiency is remarkably improved, the batch processing requirement is met, the equipment cost and the volume limitation are reduced, and the applicability is improved.

A spectrometer device (110) for obtaining spectroscopy information about at least one object (112), the spectrometer device (110) comprising: i. At least one light source (114) for generating illumination light (116) for illuminating the object (112), the light source (114) comprises at least one light emitting diode (118) and at least one luminescent material (120) for light conversion of primary light generated by the light emitting diode (118); 10 ii. At least one detector (128) for detecting the light (116, 130, 256) and thereby generating at least one detector signal; iii. At least one evaluation unit (136) configured to derive spectroscopy information about the object (112) from the at least one detector signal, the evaluation unit (136) being configured to derive spectroscopy information about the object (112) by taking into account the wavelength correction information.

The utility model relates to the field of near-infrared analytical instruments, and discloses a paraboloid-shaped sample disc and a spectrograph for near-infrared diffuse reflection spectrum acquisition, the paraboloid-shaped sample disc comprises a sample box for storing samples, the sample box is provided with a first side and a second side which are opposite, the first side of the sample box is transparent, the second side of the sample box is provided with a paraboloid-shaped reflector, and the paraboloid-shaped reflector is arranged on the first side of the sample box; the paraboloid of the paraboloid type reflecting mirror faces the first side of the sample box, and the spectrograph corresponds to the sample box. According to the device, scattered light and transmission light which are not received by the optical fiber originally are utilized through the paraboloid type reflecting mirror and the quartz glass, the absorbance value of a solid sample is increased, the scattering effect is reduced, and the background noise intensity is reduced; wavelength calibration is achieved through the PET sheet and the ceramic white board, and errors caused by light source intensity fluctuation and wavelength drift in the detection process are reduced. Finally, the baseline drift phenomenon and the stray light problem in an optical path system are reduced, the sampling representativeness is improved, the result repeatability and the signal-to-noise ratio are improved, and the spectrum collection accuracy is remarkably improved.

This application provides a multi-parameter fiber optic monitoring device for bolt loosening on transmission towers, belonging to the field of bolt loosening monitoring. It aims to solve the problems of existing bolt loosening monitoring schemes, such as susceptibility to strong electromagnetic interference, low integration, inability to cover the entire loosening cycle, and high false alarm rate. This device includes an integrated fiber optic grating-Fabry-Perot cavity sensor head and signal demodulation system, employing a coaxial push rod-mass block integrated linkage structure to achieve synchronous acquisition and mechanical decoupling of bolt axial displacement and triaxial vibration. Through a dual-band optical path architecture of 1310nm O-band and 1550nm C-band, combined with a dual-window wavelength division multiplexer, complete optical decoupling of the two parameters is achieved. It is equipped with dual-link independent wavelength calibration, hardware full-link synchronous triggering, and a dual-parameter mutual verification mechanism. This application is inherently resistant to strong electromagnetic interference and can achieve highly reliable monitoring of bolt loosening throughout its entire lifecycle.

The utility model provides a laser wavelength calibration device suitable for a long-optical-path cavity, and the device comprises a laser which is used as a light source and emits a main-path laser beam into an optical cavity; the optical cavity comprises at least two reflecting surfaces which are oppositely arranged, the optical path of the main path laser beam is increased by reflecting the main path laser beam, and the reflecting surfaces are reflecting surfaces with a light leakage phenomenon; the main path laser beam forms a plurality of reflection points on each reflection surface, the light path input side of the reference gas chamber is arranged on the back surface of the reflection surface corresponding to any reflection point, the reference detector is arranged on the light path output side of the reference gas chamber, and light transmitted from the reflection points serves as reference path light and reaches the reference detector after passing through the reference gas chamber; the main path detector is arranged at the light path output end of the optical cavity and used for receiving the main path laser beam. The calibration device is not provided with a light splitting light path any more, the reference detector and the reference gas chamber are arranged according to the characteristic of light leakage of the mirror coating, and then the power of the main light path is guaranteed.