Inspection apparatus
A technology for inspecting devices and inspecting results, applied to measuring devices, using optical devices, image data processing, etc.
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[0022] figure 1 It is a schematic hardware configuration diagram showing a main part of the inspection device 1 according to one embodiment of the present invention. The inspection device 1 is, for example, a device that performs an appearance inspection of a processed workpiece. The inspection device 1 includes a CPU 11 , a ROM 12 , a RAM 13 , a nonvolatile memory 14 , an interface 18 , an interface 19 , a bus 10 , an input / output device 60 , and an imaging device 70 .
[0023] The CPU 11 is a processor that controls the inspection device 1 as a whole. The CPU 11 reads the system program stored in the ROM 12 via the bus 10, and controls the entire inspection apparatus 1 in accordance with the system program.
[0024] The ROM 12 stores in advance system programs for executing various controls of the machine and the like.
[0025] The RAM 13 temporarily stores calculation data, input and output data, and the like.
[0026] The nonvolatile memory 14 is backed up by, for exam...
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