Gyroscope and method for correcting orthoronal error of gyroscope
A technology of quadrature error and gyroscope, applied to gyroscope/steering sensing equipment, gyro effect for speed measurement, instrument and other directions, can solve the problems of difficult operation and high cost, to overcome asymmetry, offset the quadrature error, solve The effect of uneven distribution of quadrature errors
Active Publication Date: 2019-11-29
SENODIA TECH (SHANGHAI) CO LTD
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Problems solved by technology
The disadvantage of this method is that it only compensates from the signal, and the actual quadrature error motion of the gyro structure itself still exists. When the compensation circuit itself fluctuates and the compensation value changes, there will still be quadrature error signals.
There are also other methods of physically correcting the orthogonality error of the gyro structure, such as laser resistance repair, but the operation is difficult and costly
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[0026] In describing the embodiments of the present invention, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top ", "Bottom", "Inner", "Outer", "Clockwise", "Counterclockwise" and other indicated orientations or positional relationships are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and Simplified descriptions, rather than indicating or implying that the device or element referred to must have a particular orientation, be constructed and operate in a particular orientation, and therefore should not be construed as limiting the invention. The attached drawings are schematic diagrams or conceptual diagrams, and the relationship between the thickness and width of each part, as well as the proportional relationship between each part, etc., are not completely consistent with their actual values.
[0027] fig...
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The invention provides a gyroscope and a method for correcting an orthoronal error of the gyroscope. The method comprises the following steps of enabling a mass block to be suitable for moving in a driving direction and a detection direction under the cooperation of a plurality of elastic beams; the plurality of elastic beams comprise a first elastic beam and a second elastic beam matched with each other; and the first elastic beam and the second elastic beam have different structures, so that in the process of defining the plurality of elastic beams, the adjustment of process parameters has different degrees of influence on the stiffness of the first elastic beam and the stiffness of the second elastic beam, therefore, the orthogonal error of the gyroscope can be counteracted by adjustingthe stiffness of the first elastic beam and the stiffness of the second elastic beam.
Description
technical field [0001] The invention relates to the field of semiconductor manufacturing, in particular to a gyroscope and a method for correcting the quadrature error of the gyroscope. Background technique [0002] MEMS (Micro Electro Mechanical System, Micro Electro Mechanical System) devices have been more and more widely used in products such as consumer electronics, medical treatment, and automobiles due to their small size, low cost, and good integration. Among them, the capacitive MEMS gyroscope is far smaller than other traditional gyroscopes in terms of cost, size, and power consumption. It has been widely used in the fields of mobile phone camera shake stabilization, drones, robots, and vehicle attitude control. [0003] The capacitive MEMS gyroscope is a device based on micromachining, which mainly relies on the Coriolis force to detect the angular velocity signal, and has two working modes, namely, the driving mode and the detection mode. Such as figure 1 As sh...
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IPC IPC(8): G01C19/5656G01C25/00
CPCG01C19/5656G01C25/00
Inventor 邹波郭梅寒
Owner SENODIA TECH (SHANGHAI) CO LTD