Gyroscope and method for correcting orthogonal error of gyroscope by fusing
A technology of quadrature error and gyroscope, applied to gyroscope/steering sensing equipment, gyro effect for speed measurement, instrument and other directions, can solve the problems of difficult operation and high cost, and achieve the effect of offsetting quadrature error
Active Publication Date: 2019-11-29
SENODIA TECH (SHANGHAI) CO LTD
View PDF9 Cites 2 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
The disadvantage of this method is that it only compensates from the signal, and the actual quadrature error motion of the gyro structure itself still exists. When the compensation circuit itself fluctuates and the compensation value changes, there will still be quadrature error signals.
There are also other methods of physically correcting the orthogonality error of the gyro structure, such as laser resistance repair, but the operation is difficult and costly
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0022] In the description of the embodiments of the present invention, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top" "," "bottom", "inside", "outside", "clockwise", "counterclockwise" and other indicated orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and The description is simplified rather than indicating or implying that the device or element referred to must have a particular orientation, be constructed and operate in a particular orientation, and therefore should not be construed as limiting the invention. The accompanying drawings are schematic diagrams or conceptual diagrams, and the relationship between the thickness and width of each part, as well as the proportional relationship between each part, etc., are not completely consistent with t...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
The invention provides a gyroscope and a method for correcting the orthogonal error of the gyroscope by fusing. The gyroscope in the method comprises a mass block and a plurality of fixing anchor points, wherein the plurality of fixing anchor points are connected with the mass block through elastic beams respectively, so that the mass block is suitable for moving along a driving direction and a detection direction; and electric signals are loaded between the mass block and corresponding fixing anchor points to fuse the elastic beams for connecting the mass block and the corresponding fixing anchor points in order to adjust the support rigidity of the mass block in different axial directions, thereby counteracting the orthogonal error of the gyroscope.
Description
technical field [0001] The invention relates to the field of semiconductor manufacturing, in particular to a gyroscope and a method for correcting the quadrature error of the gyroscope by fusing. Background technique [0002] MEMS (Micro Electro Mechanical System, Micro Electro Mechanical System) devices have been more and more widely used in products such as consumer electronics, medical care, and automobiles due to their small size, low cost, and good integration. Among them, capacitive MEMS gyroscopes are much smaller than other traditional gyroscopes in terms of cost, size and power consumption. They have been widely used in mobile phone photo stabilization, attitude control of drones, robots and vehicles. [0003] Capacitive MEMS gyroscopes are devices based on micromachining, which mainly rely on Coriolis force to detect angular velocity signals, and have two working modes, namely, a driving mode and a detection mode. like figure 1 As shown, under ideal conditions, w...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/5656G01C25/00
CPCG01C19/5656G01C25/00
Inventor 邹波郭梅寒
Owner SENODIA TECH (SHANGHAI) CO LTD