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Alignment mask plate, mask plate and manufacturing method

A manufacturing method and mask technology, which are used in semiconductor/solid-state device manufacturing, vacuum evaporation plating, coating, etc., can solve problems such as occupying fixture space, and achieve the effect of high typesetting rate requirements and meeting typesetting rate requirements.

Inactive Publication Date: 2019-12-03
KUNSHAN GO VISIONOX OPTO ELECTRONICS CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Improving the typesetting rate is a direct and effective way for all OLED industries to achieve high profitability. However, under the requirements of high typesetting rate, the area where the fine metal mask plate needs to be evaporated will occupy most of the fixture space. Fixture design has higher requirements

Method used

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  • Alignment mask plate, mask plate and manufacturing method
  • Alignment mask plate, mask plate and manufacturing method
  • Alignment mask plate, mask plate and manufacturing method

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Embodiment Construction

[0035] In order to facilitate the understanding of the present application, the present application will be described more fully below with reference to the relevant drawings. Preferred embodiments of the application are shown in the accompanying drawings. However, the present application can be embodied in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the understanding of the disclosure of the application more thorough and comprehensive.

[0036] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the technical field to which this application belongs. The terms used herein in the specification of the application are only for the purpose of describing specific embodiments, and are not intended to limit the application. As used herein, the term "and / or" includes any and all combinati...

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Abstract

The invention relates to an alignment mask plate, a mask plate and a manufacturing method. The alignment mask plate comprises an alignment main body, the alignment main body comprises an alignment part and a shielding part, the alignment part and the shielding part are integrally formed, a first etching line is arranged between the alignment part and the shielding part, the alignment part comprises an alignment mark, the alignment mark is used for aligning the alignment mask plate with a mask frame, and the shielding part is used for shielding a non-evaporation area on a to-be-evaporated substrate. The alignment part and the shielding part are integrally formed, so that the net stretching duration is shortened, the deformation resistance of the alignment part and the shielding part in thenet stretching process is improved, the alignment part and the shielding part can be narrowed, and the requirement for the high typesetting rate is met; after the net is stretched, the net is cut along the first etching line, so that the influence of the shielding part on the alignment part in the mask plate moving process is avoided, and the alignment precision is improved.

Description

technical field [0001] The present application relates to the field of display technology, in particular to an alignment mask, a mask and a manufacturing method. Background technique [0002] OLED (Organic Light-Emitting Diode) is an organic light-emitting diode. OLED display technology has many advantages such as active light emission, high contrast ratio, easy realization of flexible display and 3D display, etc., and has attracted more and more attention. [0003] Improving the typesetting rate is a direct and effective way for all OLED industries to achieve high profitability. However, under the requirements of high typesetting rate, the area where the fine metal mask plate needs to be evaporated will occupy most of the fixture space. Fixture design has higher requirements. Contents of the invention [0004] Based on this, the present application provides an alignment mask, a mask and a manufacturing method, which are beneficial to meet the requirement of a high types...

Claims

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Application Information

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IPC IPC(8): C23C14/04C23C14/24H01L51/56H01L51/00
CPCC23C14/042C23C14/24H10K71/164H10K71/166H10K71/00
Inventor 韩冰李伟丽刘明星王水俊
Owner KUNSHAN GO VISIONOX OPTO ELECTRONICS CO LTD
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