Terahertz phase shifter with symmetrical impedance phase shifting microstructure
A symmetrical impedance, terahertz technology, applied in the field of terahertz technology, can solve the problems of less research on terahertz phase shifters and no device structure solutions, and achieve the effect of excellent linearity
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[0014] see figure 1 , 2 , the present invention provides a terahertz phase shifter with a symmetrical impedance phase-shifting microstructure, three phase-shifting microstructures are arranged side by side along the split plane of the WR3 standard waveguide E plane, and the split planes are the waveguide axis and The plane defined by the midline of the E plane parallel to it; each phase-shifting microstructure consists of 4 sub-modules arranged on the quartz dielectric substrate 20, each sub-module includes a Schottky diode 21 and a probe 22, Xiao One end of the Teky diode is connected to the probe, and the other end is connected to the bonding pad 23. The four probes are arranged in an orthogonal matrix, and the long axes of the probes are arranged along two straight lines parallel to and perpendicular to the axis of the waveguide; the probes are located inside the waveguide. cavity. 24 is the via hole ground wire.
[0015] The present invention adopts the WR3 standard rec...
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