Capacitance/impedance type humidity sensor based on barium strontium titanate nanotube structure

Abstract

The invention discloses a humidity sensor based on a barium strontium titanate nanotube thin film structure. The barium strontium titanate humidity sensor based on the nanotube structure sequentiallycomprises a bottom electrode, a mica substrate, a barium strontium titanate nanotube thin film and an inserted finger-shaped top electrode. The humidity sensor disclosed by the invention takes the mica substrate as the substrate, the mica substrate has good light transmittance and can provide possibility for transparentization of devices in the future; and the mica substrate is flexible and bending-resistant, so that the device has a certain flexibility. The barium strontium titanate nanotube thin film is used as a humidity sensing material, the response is sensitive, the impedance and the capacitance can be greatly changed in a change interval of 15% -95% of humidity, and the barium strontium titanate nanotube thin film has a wide application prospect in the humidity sensor based on the nano-structure material.

Description

technical field [0001] The invention belongs to the field of humidity sensors, in particular to a humidity sensor based on strontium barium titanate nanotube structure. Background technique [0002] In recent years, the development of the Internet of Things technology has set off a new wave of information technology innovation, and sensors as the basis of the Internet of Things are particularly important, monitoring the state of the environment in real time and feeding back the information obtained. For example, the humidity sensor plays an important role in it. [0003] The control of humidity parameters is particularly critical in industrial production. If the humidity is too high, it will cause accelerated deterioration and decay of food, cloth, paper and other products, and it will also cause metal rust. Therefore, a humidity sensor is required to strictly detect humidity. However, it is difficult to prepare a humidity sensor that satisfies reliability, long life, stabi...

AI Technical Summary

Problems solved by technology

However, it is difficult to prepare a humidity sensor that satisfies reliability, long life, stability, and fast response at the same time. The important reason is that the existing material combination and preparation method are not perfect.

Images