Heating equipment fault detection method and heating system with fault detection function

A technology for fault detection and heating equipment, which is applied in the direction of measuring devices, measuring heat, and parts of thermometers, etc., can solve problems such as failure to detect faults in heating equipment, and achieve the effect of ensuring stable operation and improving work efficiency

Active Publication Date: 2020-03-10
德运创鑫(北京)科技有限公司
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  • Claims
  • Application Information

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Problems solved by technology

[0005] Based on this, it is necessary to provide a heating equipment fault detection method and a heating system with fault detection function for the problem that the traditional scheme cannot detect faults during the heating process of the heating equipment

Method used

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  • Heating equipment fault detection method and heating system with fault detection function
  • Heating equipment fault detection method and heating system with fault detection function
  • Heating equipment fault detection method and heating system with fault detection function

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Embodiment Construction

[0060] In order to make the purpose, technical solution and advantages of the present application clearer, the fault detection method and system of the heating equipment of the present application will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present application, not to limit the present application.

[0061]An embodiment of the present application provides a method for detecting a heating device failure. It should be noted that the heating equipment failure detection method provided in the present application should not be limited to be applied to the heating equipment in the PVD (Physical Vapor Deposition) isolation chamber. Any heating equipment can adopt the heating equipment failure detection method provided in this application. Optionally, the heating equipment provided in the present application is applied in a PVD...

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Abstract

The invention relates to a heating equipment fault detection method and a heating system with a fault detection function. A plurality of heating areas are arranged in heating equipment. The method comprises the following steps: selecting one heating area and two adjacent heating areas of the heating area, acquiring a heating area temperature of the heating area and two adjacent heating area temperatures of the two adjacent heating areas, respectively calculating difference values between the temperature of the heating area and the temperatures of the two adjacent heating areas to obtain a first temperature difference value and a second temperature difference value, reading a preset temperature difference threshold value, judging whether the first temperature difference value and the secondtemperature difference value are both greater than the temperature difference threshold value or not, judging that the selected heating area breaks down if the temperature difference values are greater than the temperature difference threshold value, and troubleshooting the fault occurrence position of the selected heating area. By calculating the temperature difference between the adjacent heating areas and comparing the temperature difference with the preset threshold value, whether the heating areas break down or not is judged and the fault occurrence position is checked, so that stable operation of the heating equipment is guaranteed and the working efficiency is improved.

Description

technical field [0001] The present application relates to the field of heating equipment, in particular to a heating equipment failure detection method and a heating system with a failure detection function. Background technique [0002] PVD is physical vapor deposition technology, which is an advanced surface treatment technology widely used in the world. Its working principle is to separate the gas or evaporated substance partly through gas discharge under vacuum conditions, and deposit the evaporated substance or its reactant on the substrate while the gas ions or evaporated substance ions are bombarded. PVD (Physical Vapor Deposition Technology) has the characteristics of fast deposition speed and clean surface, especially has the advantages of strong film adhesion, good winding and wide range of plating materials. PVD (Physical Vapor Deposition) equipment mainly includes a PVD (Physical Vapor Deposition) isolation chamber, in which craftsmen perform the main PVD (Physi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01K1/02
CPCG01K1/02
Inventor 徐悦
Owner 德运创鑫(北京)科技有限公司
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