Air tightness detection device with self-leakage and internal volume influence correction function and detection method thereof
A technology for air tightness detection and internal volume, which is used in the testing of measuring devices, machine/structural components, and liquid tightness measurement using liquid/vacuum degree. , detection device leakage and other problems, to achieve the effect of volume reduction, prevention of self-failure and cost reduction
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[0031] Such as Figure 1-3 As shown, an air tightness detection device with the function of correcting its own leakage and the influence of internal volume includes a fluid source 1, a control unit A2, a metering unit 3, a control unit B4, and a boundary valve 5 connected in sequence. The control A flow bypass valve 7 is connected between the unit A2 and the control unit B4; the control unit A2 controls the operation of the metering unit 3, the control unit B4, the boundary valve 5, and the flow bypass valve 7, and the control unit B4 includes one or more valves.
[0032] Take the inert gas medium as an example to make a technical description. According to the adsorption characteristics of different fluids in the cavity of the process container and the cavity of the target container, the fluid should be selected with relatively low inertness and adsorption characteristics. Under the actual operating pressure, the leakage and dead volume of the test system itself have a delay...
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