A back-illuminated ultraviolet-infrared two-color photodetector and its preparation method

Abstract

The invention discloses a back-illuminated ultraviolet-infrared dual-color photodetector, which comprises a substrate, a buffer transition layer, an n-type doped layer, an unintentional doped layer and a conductive layer arranged sequentially from bottom to top. Wherein the non-intentional doping layer is provided with a micro-nano-scale pillar array facing away from the surface of the substrate, and the conductive layer will cover the pillar array. The n-type doped layer, the unintentionally doped layer and the conductive layer will form a photodetection structure of the MIS structure, wherein the unintentionally doped layer as a light absorbing layer can absorb ultraviolet light to form photogenerated carriers, thereby realizing ultraviolet light detection; and Due to the preset Schottky barrier between the thermionic transitionable conductive layer and the unintentionally doped layer, infrared photodetection based on surface plasmon-induced thermionic emission can be realized at this time, thus integrating ultraviolet-infrared dual-color detection in the same photodetector. The present invention also provides a preparation method, which also has the above beneficial effects.

Description

technical field [0001] The invention relates to the technical field of photoelectric detection, in particular to a back-illuminated ultraviolet-infrared two-color photodetector and a method for preparing the back-illuminated ultraviolet-infrared two-color photodetector. Background technique [0002] In today's era of highly developed informatization, ultraviolet and infrared photoelectric detection materials and devices, as an important pillar of information acquisition, play an important role in national economic construction, national defense construction, and people's daily life. However, at present, ultraviolet and infrared photodetectors are mainly used for their respective single-band detection, that is, the detectors in the prior art can only realize monochromatic detection. With the continuous improvement of people's demand for the integration of optoelectronic devices and the complexity of the practical application environment, monochromatic photodetectors are incre...

AI Technical Summary

Problems solved by technology

However, at present, ultraviolet and infrared photodetectors are mainly used for their respective single-band detection, that is, the detectors in the prior art can only achieve monochromatic detection.

With the continuous improvement of people's demand for the integration of optoelectronic devices and the complexity of the actual application environment, monochromatic photodetectors are increasingly unable to meet the needs of practical applications.

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