A device and method for measuring gas pressure and composition in a cavity of an extremely small sealed device
A technology of gas pressure and measurement method, which is used in measurement devices, measurement of fluid pressure, simultaneous measurement of multiple hydraulic valves, etc. The effect of measurement accuracy problem, low measurement lower limit, and reduction of gas concentration content measurement uncertainty problem
Active Publication Date: 2021-11-09
LANZHOU INST OF PHYSICS CHINESE ACADEMY OF SPACE TECH
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Problems solved by technology
Therefore, the existing methods for measuring the gas component content in the cavity of sealed devices can no longer meet the needs of the current packaging technology evaluation of extremely small sealed devices
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Embodiment Construction
[0036] The present invention will be described in detail below with reference to the accompanying drawings and examples.
[0037] The invention provides a device and method for measuring the gas pressure and composition of the cavity of a very small sealed device, such as figure 1 As shown, including vacuum gauge A 1, vacuum gauge B 14, pressure measurement chamber 2, puncture structure, pressure ring 7 of the sealing device under test, 8 sealing device under test, mounting flange 9 of the sealing device under test, and stop valve A 10 , cut-off valve B 11, cut-off valve C 13, sampling hole 12, component measurement chamber 15, cut-off valve A 16, cut-off valve B 20, cut-off valve C 21, cut-off valve D 24, evacuation small hole 17, partial pressure mass spectrometry Gauge 18, evacuated cavity 19, rough vacuum pump 22, high vacuum pump 23 and corresponding pipeline.
[0038] Among them, the vacuum gauge A 1 is installed on the pressure measurement chamber 2 to realize the pres...
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Abstract
The invention discloses a device and method for measuring gas pressure and components in a cavity of a very small sealing device. The volume of the inner cavity of the gas-tight device can be achieved by using the present invention at 0.005cm 3 ~0.1cm 3 Measurement of gas pressure and component content in the cavity of extremely small sealed devices. The invention is a measurement method combining static expansion and dynamic flow mass spectrometry. The double small hole structure can not only overcome the quality discrimination effect of gas sampling, but also ensure the pressure stability of the pressure measurement chamber and the component measurement chamber. It can solve the problem of rapid pressure decay in the cavity of the sealed device under test in the measurement process of the existing method, the slow response of mass spectrometry time series, and the inability to accurately measure the gas components of the product with a particularly small internal cavity volume in the sealed device.
Description
technical field [0001] The invention relates to the technical field of vacuum measurement, in particular to a device and method for measuring gas pressure and components in a cavity of an extremely small sealed device. Background technique [0002] Aerospace, aviation and other fields use gas-sealed devices. If the concentration of impurity gases inside the package, such as water vapor, oxygen, hydrogen, and carbon dioxide, is too high, it will cause corrosion, electrical performance parameter drift, and electron migration inside the device. Therefore, the gas pressure and component content in the cavity of the sealed device are one of the important indicators for evaluating the reliability of the package of the hermetic device. The traditional test method adopts the method of cavity puncture sampling and dynamic mass spectrometry analysis at the same time. During the sampling and analysis process, the cavity pressure of the sealed device under test decays rapidly. For extre...
Claims
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IPC IPC(8): G01M13/00G01L15/00G01N27/62
CPCG01M13/00G01L15/00G01N27/62
Inventor 陈联成永军董猛郭美如张瑞年冯天佑黄宏
Owner LANZHOU INST OF PHYSICS CHINESE ACADEMY OF SPACE TECH