This invention relates to the field of passive
radio frequency microwave devices, specifically to a filter-type Wilkinson
chip power divider and its fabrication method. The divider includes an aluminum
nitride substrate, an adhesion layer, a
metal ground plane, a buried
dielectric layer, three-dimensional interdigitated
tantalum nitride resistors, a filter power divider
metal structure, and a
passivation layer. The adhesion layer is disposed on the surface of the aluminum
nitride substrate, the
metal ground plane is disposed on the surface of the metal adhesion layer, the buried
dielectric layer covers the surface of the metal
ground plane, and the buried
dielectric layer has
resistor trenches and interconnecting vias etched inside. The three-dimensional interdigitated
tantalum nitride resistors are disposed within the
resistor trenches and electrically connected to the metal ground plane through the interconnecting vias. The filter power divider metal structure is disposed on the surface of the buried
dielectric layer, and the
passivation layer is deposited on the surface of the filter power divider metal structure. This invention achieves integrated power distribution,
passband filtering, port isolation, and
harmonic suppression functions through a single-
chip structure. Compared to traditional modular solutions, it significantly reduces the device size and can meet the
miniaturization and high integration requirements of
radio frequency front-ends.