Radio frequency MEMS (micro-electromechanical system) switch and forming method thereof

Abstract

The invention provides a radio frequency MEMS (micro-electromechanical system) switch and a forming method thereof. The switch comprises a substrate, a barrier layer formed on the substrate, a drive electrode, a microwave signal coplanar waveguide transmission line and a metal cantilever beam arm formed on the microwave signal coplanar waveguide transmission line, the drive electrode and the microwave signal coplanar waveguide transmission line are formed on the substrate, the microwave signal coplanar waveguide transmission line is provided with a switch contact point and an anchor region, the position of the switch contact point corresponds to a free end of the metal cantilever beam arm, the anchor region corresponds to a fixed end of the metal cantilever beam arm, and the switch contact point is composed of a copper film and a graphene film formed on the copper film. When the drive electrode is not applied with drive voltage, the metal cantilever beam arm is disconnected with the switch contact point to enable the switch to be off, and when the drive electrode is applied with drive voltage, electrostatic force is generated between the metal cantilever beam arm and the drive electrode, and the metal cantilever beam arm is enabled to bend to contact with the switch contact point so as to enable the switch to be on. The switch and the method have the advantages of lower thermal failure and high power capacity of the switch.

Description

technical field [0001] The invention belongs to the field of radio frequency microelectromechanical systems (MEMS), and in particular relates to a radio frequency MEMS switch and a forming method thereof. Background technique [0002] RF MEMS (Micro-Electro-Mechanical Systems, RF Micro-Electro-Mechanical Systems) switch is a radio-frequency switch made using MEMS technology. It controls the on and off of radio-frequency signals through the movement of micro-mechanical structures. RF MEMS switch is one of the core devices of microwave and radio frequency transceiver systems, and has a wide range of applications in satellite communication, radar, missile control and other fields. Compared with traditional PIN and FET microwave switch devices, MEMS switches not only have extremely excellent microwave performance such as high isolation, low loss, low insertion loss, and high linearity, but also have mass production, small size, and easy integration with The characteristics of a...

AI Technical Summary

Problems solved by technology

For traditional contact RF MEMS switches that use metal-to-metal direct contact to control the on and off of RF signals, the heat caused by micro-fusion welding or switch burnout caused by excessive input power in the on-state The failure problem is the main factor restricting its power capacity, and the large contact resistance between metal and metal is the main source of local high temperature, which leads to micro-fusion welding or even burning problems

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