microchannel structure
A microfluidic channel, first-class technology, applied in the direction of laboratory equipment, laboratory containers, chemical instruments and methods, etc., can solve the problems of transporting gas, unusable, etc.
Active Publication Date: 2021-12-03
MICROJET TECH
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Problems solved by technology
[0004] In the prior art, although an integrally formed miniaturized fluid delivery structure has been manufactured using micro-electromechanical processes, the existing miniaturized fluid delivery structure cannot be used to transport gas due to different actuation methods during use. , how to use the innovative miniaturized fluid delivery structure to break through its technical bottleneck is an important content for development
Method used
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[0065] Some typical embodiments embodying the features and advantages of the present application will be described in detail in the description in the following paragraphs. It should be understood that the present case can have various changes in different aspects without departing from the scope of the present case, and the descriptions and diagrams therein are used for illustration in nature rather than limiting the present case.
[0066] The micro-channel structure in this case is used to transport fluid or gas, and increase or control the flow rate of fluid or gas. see figure 1 , in the embodiment of this case, the microchannel structure 1 includes: a substrate 1a, a first insulating layer 1b, a supporting layer 1c, a valve layer 1d, a second insulating layer 1e, a vibrating layer 1f, and a lower electrode layer 1g, a piezoelectric actuation layer 1h, a pad layer 1i, and a mask layer 1j. The mask layer 1j, the substrate 1a, the first insulating layer 1b, the support laye...
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Abstract
A microfluidic channel structure, comprising a substrate, forming at least one channel through an etching process; a supporting layer, forming a conductive part through an etching process; a valve layer, forming a movable part and a hollow hole through an etching process , and the inner side of the base forms a first chamber, the hollow hole communicates with the first chamber; a second insulating layer forms a support portion with a height through an etching process, and the inner side of the support portion forms a second chamber, The second chamber communicates with the first chamber through the hollow hole; a vibrating layer, forming a suspension part through etching process; and a pad layer. Provide driving power with different phase charges to the pad layer to drive and control the vertical displacement of the floating part of the vibration layer, and the relative displacement between the movable part and the conductive part to complete fluid transmission.
Description
technical field [0001] This case relates to a micro-channel structure, especially a micro-channel structure driven by electric energy. Background technique [0002] At present, in various fields, whether it is medicine, computer technology, printing, energy and other industries, products are developing towards refinement and miniaturization. Among them, the fluid delivery included in products such as micro pumps, sprayers, inkjet heads, and industrial printing devices Structure is its key technology. [0003] With the rapid development of science and technology, the application of fluid conveying structure is becoming more and more diversified, such as industrial application, biomedical application, medical care, electronic heat dissipation, etc., and even the recent popular wearable devices can be seen. It can be seen that The traditional fluid delivery structure has gradually tended to miniaturize the device and maximize the flow rate. [0004] In the prior art, although...
Claims
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IPC IPC(8): B01L3/00
CPCB01L3/502707
Inventor 莫皓然余荣侯张正明戴贤忠廖文雄黄启峰韩永隆郭俊毅
Owner MICROJET TECH